ACCELERATION INCLINOMETERS 9/22/2016 This document and the - - PowerPoint PPT Presentation

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ACCELERATION

INCLINOMETERS

9/22/2016

This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

TS family Tilt sensors

Colibrys / Confidential / Tilt presentation 2

• 5. Introducing

TS9001:

• Product architecture
• Specifications: bias

performance, bias stability

• Competitive landscape
• 1. Colibrys

MEMS technology

• 2. What is tilt

measurement?

• 3. Applications
• 4. TS family

products specifications

• 6. Conclusions
• 7. Sources of

information

• 8. Annexes

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Colibrys / Confidential / Tilt presentation 3

OUR VISION

World leader for high-end, robust MEMS sensors, supported by a commitment of excellence over the long term Partner of choice for who wants to pioneer in innovative high performance MEMS

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Colibrys / Confidential / Tilt presentation 4

OUR MISSION

Being the strategic partner for MEMS technology within the Safran group, Safran Colibrys is a worldwide leader in the high-end MEMS accelerometer market

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MEMS capacitive technology

Colibrys / Confidential / Tilt presentation 5

MEMS

• Silicon micro-machined sensor chip
• High-end dual side alignment and photolitho
• 3 wafers assembly by silicon fusion bonding (SFB)  3D Bulk Technology

ADC

MEMS ASIC Mechanics

• Spring-mass system
• Large mass and small gap
• Controlled gas damping

1 2

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Colibrys key differentiation: Bulk micromachining

Colibrys / Confidential / Tilt presentation 6

Surface micro-machining Bulk micro-machining Sensor design

• In plan

displacement

• Out of plan

displacement

Gap control

• Thin proof mass
• Gap control by photolithography and

DRIE etching (precision 17%)

• Gap of ~4 to 6µm ±10’000Å
• Thick proof mass
• Gap control by oxide growth (precision 1.5%)
• Gap of ~2µm ±300Å

Mass

• 0.03 to 0.3 milligrams
• Larger noise and lower stability
• 5 to 15 milligrams
• Much lower Brownian noise and better

stability due to larger mass

Capacitor

• 2 x 2 to 5pF
• Larger noise and lower stability
• 2 x 15 to 50pF
• Much larger capacitances: required for

low noise and high stability

Manufacturing

• Smaller in size
• Up to three axis

possible with one single die

• Monolithic
• MEMS above IC
• Rapid etching due to small thickness of

the mass (thickness ~5 to 10µm)

• Lower manufacturing cost
• Larger in size
• Only one axis
• Hybrid assembly
• Longer etching time

due to mass thickness (>350µm).

• More expensive and larger but better

performances (no compromises)

This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

Colibrys key differentiation: Bulk micromachining

Colibrys / Confidential / Tilt presentation 7

Surface micro-machining Bulk micro-machining Sensor design

• In plan

displacement

• Out of plan

displacement

Gap control

• Thin proof mass
• Gap control by photolithography and

DRIE etching (precision 17%)

• Gap of ~4 to 6µm ±10’000Å
• Thick proof mass
• Gap control by oxide growth (precision 1.5%)
• Gap of ~2µm ±300Å

Mass

• 0.03 to 0.3 milligrams
• Larger noise and lower stability
• 5 to 15 milligrams
• Much lower Brownian noise and better

stability due to larger mass

Capacitor

• 2 x 2 to 5pF
• Larger noise and lower stability
• 2 x 15 to 50pF
• Much larger capacitances: required for

low noise and high stability

Manufacturing

• Smaller in size
• Up to three axis

possible with one single die

• Monolithic
• MEMS above IC
• Rapid etching due to small thickness of

the mass (thickness ~5 to 10µm)

• Lower manufacturing cost
• Larger in size
• Only one axis
• Hybrid assembly
• Longer etching time

due to mass thickness (>350µm).

• More expensive and larger but better

performances (no compromises)

Bulk micromachining combined with hybrid assembly offer the best

• pportunity for high-end

performances

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What is Tilt?

Tilt is an angle of object inclination with respect to terrestrial gravity vector (1G).

• Fig. 1. tilt angle

What is Tilt measurement?

Colibrys / Confidential / Tilt presentation 8

) cos( 1 ] [    g g a

• Fig. 2. Tilt sensor output vs rotation at 360°

Tilt sensor position

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Colibrys / Confidential / Tilt presentation 9

STANDARD PERFORMANCES: TS9001 – 1G STATIC MEASUREMENTS UP TO +/-90°

Geotechnical monitoring of critical locations: in-place inclinometers Civil Engineering: survey and SHM Railways: train positioning systems Military: levelling antennas

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Colibrys / Confidential / Tilt presentation 10

STANDARD PERFORMANCES TS8002 – 2G

STATIC 3D MEASUREMENTS OR VIBRATION ENVIRONMENTS

Drilling: logging while drilling (LWD) Railways: train tilt systems Naval – Military: sonar towed arrays antenna Industrial: construction machines

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Colibrys / Confidential / Tilt presentation 11

HIGH PERFORMANCES: TS1000T – 2,5,10G

ENERGY SECTOR, HIGH TEMPERATURE

High precision tilt measurement is required for harsh environments, high depth exploration in Energy market - Oil and Gas extraction, Fracking, Mining... TS1000T target applications in Energy market :

• MWD (Measurement While Drilling)
• HDD (Horizontal Directional Drilling)
• Orientation of borehole logging instruments.

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HDD,

• rientation of

logging instruments

How to choose an accelerometer for the energy market?

Colibrys / Confidential / Tilt presentation 12

Sectors of energy applications

• 40°C + 125°C

Borehole survey Wireline, inplane, inclinometers Measurement While Drilling (MDW) Logging survey < 0.1° all error, EOL < 0.5-1° all error, EOL

System accuracy

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TS family products: specifications

Colibrys / Confidential / Tilt presentation 13

Tilt measurement key parameters What does it define for tilt measurement ?

Bias long term stability System long lifecycle without re- calibration; maintenance economy; long term accuracy Non linearity Better SF accuracy Noise Resolution – lowest acceleration measured Reliability of parameters Long lifecycle, repeatability of performances, tight spread Consumption Adapted for autonomous system, especially for civil Engineering

Colibrys Tilt Products Datasheet

Unit TS9001.D TS8002.D TS1002T

Range

• Typ. (1σ)

+/- 1 g (+/-90°) +/- 2g +/- 2g

Bias temperature coeficient

°/°C <0.006 0.012 0.0086

Bias Long term stability ̽

° < 0.043 < 0.086 <0.114

Scale factor

mV/g 2000 1000 1350

Scale factor temperature coeficient

ppm/°C 100 100 120

Scale Factor long term Stability (one Year)

ppm 300 300 1000

Resolution @ 1Hz

° 0.0025 0.0057 0.0004

Noise (in Band)

[°/√Hz] 0.0005 0.001 0.0004

Non- Linearity

% FS <1 <1 < 0,3

Operating temperature

[°C]

• 40 to 125°C
• 40 to 125°C
• 50+175

Shock (single shock)

[g] 6000 6000 6000

Consumption

mW 2 2 9.9

Package

LCC20 LCC48 LCC20

* the test conditions for the TS1000T are more severe compared to other Colibrys sensors

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 The main differentiation factor of Colibrys sensors – accurate functioning in harsh environments, performance long term stability, high reliability  Those features are indispensable for tilt applications in 4 targeted by TS Family Markets : Essential Tilt applications for TS product family

Colibrys / Confidential / Tilt presentation 14

Energy Civil Engineering Military Railways

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Colibrys / Confidential / Tilt presentation 15

INTRODUCTION OF TS9001

 Architecture

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 MEMS sensor

> 3D bulk-die > Optimized for bias stability > Patended soft die attach process Stability

 Low noise ASIC

> Analog output 0.5-4.5 V > Low consumption < 400 UA > Ratiometric output > Microcontroller for calibration datas >

• Ext. temperature sensor

 LCC Substrate

> Leadless ceramic package

 8.9 mm x 8.9 mm  Finishing: W/Ni/Au  Hermetically sealed

TS9001 sensor architecture

Colibrys / Confidential / Tilt presentation 16

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Colibrys / Confidential / Tilt presentation 17

EACH PRODUCT IS FULLY TESTED BEFORE DELIVERY TO THE CUSTOMER

CALIBRATIONS

Bias Scale factor Non linearity Frequency response

MEASURES

Bias & scale factors temperature coefficient

• n tumble tests

Operating current consumption Non linearity

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Colibrys / Confidential / Tilt presentation 18

A LONG-TERM RELATIONSHIP

 Long-term supply guarantee  Financial back-up by an international SAFRAN group  Guarantee of product performance proved by track records  Technical expertise  Customized terms & conditions  Excellence in operations and service  Supply chain efficiency  Custom design solution

This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

Colibrys / Confidential / Tilt presentation 19

TS FAMILY TARGET SECTORS FOR TILT MEASUREMENT ARE:

 Energy Railway  Civil Engineering Military

Where accurate functionning in harsh environnements, long-term stability of performances are mandatory for System confidence TS FAMILY EXISTS IN:

 Standard temperature up to 125 °C  High performance and temperature up to 175°C

This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

Colibrys / Confidential / Tilt presentation 20

ALL DOCUMENTATION YOU NEED IN ONE CLICK:

Datasheets TS9001, TS8002, TS1000T

Recommended circuit Functional Block Diagram SMD, handling recommandations

Application Notes:

Train Positioning Drilling  Tilt survey

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