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1 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Cédric Clévy Micky Rakotondre Nicolas Chaillet

Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World

www.femto-st.fr/WS-icra10/

WORKSHOP – May, 3, 2010 IEEE International Conference on Robotics and Automation

microPAdS

2 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Some characteristics of the « micro-nano world »

1 mm 100 µm 10 µm 1 µm 1µm 10µm 100µm 1mm Optical microscopy Electronic scanning Microfabrication manufacturing Surface effects are predominant 200 µm

• ocyte

bacterium 2-6 µm pollen 20-40 µm lymphocyte 6-15 µm Hearing prosthesis 1 mm Gear wheel 800 µm carbon nanotube Diameter: 100 nm coil 130 µm

30 µ m 10 µ m

Lens with its support 500 µm mirror spectrometer

Assembled systems

100 nm

3 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Scaling down effects

• Consequences of scaling down:

– needs of microsystems or systems acting at the microscale – requirements of measurements (Force & position) for control issues or to understand physical phenomena

• Micro-nano scale specificities:

– Signal of very small amplitude, small signal to noise ratio – Influence of surface forces – Small free space – Resolution in the submicron and micro-Newton range – Influence of environment

4 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Problematic

• Existing sensors

– Interferometers – Scanning electron microscopes – Cameras – Laser sensors – Strain gage – Piezoceramic sensors – Capacitive sensors – … Size, Nbe DOF, price Range, resolution, bandwith, robutsness Lack of sensors with suitable range, accuracy, bandwith, number

• f DOF and size

Pushing back of the limits of automation Development of new sensors Robustness fragility Size, range, resolution

• +

5 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Main consequences for control

input controller system Measurement/sensors Output Noisy signals:

• low magnitude of usefull signals
• ratio Signal/Noise is

unfavourable High environment sensibility Non linear, variant and stochastics models

• difficulty to integrate the sensors
• sensibility to the environment

6 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World

Observer techniques appied to the control of piezoelectric microactuators Micky Rakotondrabe, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, from FEMTO-ST (Besançon, France) Measurement and control for high-speed sub-atomic positioning in scanning probe microscopes Andrew J. Fleming and Kam K. Leang, from University of Newcastle (Callaghan, Australia) and University of Nevada (Reno, USA) Microrobotic tools for the measurement of small forces

• S. Muntwyler, F. Beyeler and B. J. Nelson, from ETH (Zurich, Swizerland)

In-situ mechanical characterization of mouse oocytes using a cell holding device Roxanne Fernandes, Andrea Juriscova, Robert F. Casper and Yu Sun, from University of Toronto (Toronto, Canada) and Samuel Lunenfeld Research Institute, Toronto Mount Sinai Hospital (Toronto, Canada) In situ characterization of thin-film nanostructures with large-range direct force sensing Gilgueng Hwang and Stéphane Regnier, from University Pierre et Marie Curie (Paris, France) A mechanism approach for enhancing the dynamic range and linearity of MEMS optical force sensing Gloria J. Wiens, from University of Florida (Gainesville, USA) Observer-based estimation of weak forces in a nanosystem measurement device Alina Volda, from GIPSA-Lab (Grenoble, France) 9:00 am 10:00 am 11:00 am 1:30 pm 2:30 pm 3:30 pm 4:30 pm