Process Data Logging 4 June 2019 DTU Nanolab A flexible equipment - - PowerPoint PPT Presentation

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Process Data Logging 4 June 2019 DTU Nanolab A flexible equipment - - PowerPoint PPT Presentation

Mar 14, 2023 33 likes •259 views

Jesper Hanberg, Henrik Nyholt, Thger Eskildsen A flexible equipment process datalog and sample tracking system Process Data Logging 4 June 2019 DTU Nanolab A flexible equipment process datalog and sample tracking system 2 Cleanroom process

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SLIDE 1
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SLIDE 2 DTU Nanolab 4 June 2019 A flexible equipment process datalog and sample tracking system

Process Data Logging

Jesper Hanberg, Henrik Nyholt, Thøger Eskildsen A flexible equipment process datalog and sample tracking system

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SLIDE 3 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Cleanroom process data logging …

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SLIDE 4 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Outline

  • Instead we want …
  • Process Data Log System

– User experience – Staff interface – Behind the scene

  • Outlook
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SLIDE 5 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

We want …

  • Automatic link between tool usage and log data
  • Users to have concurrent access to log data
  • Easy configurable fields for different tools
  • Users to be reminded of entering and saving log data
  • Users to be limited to edit/save their own data
  • Different input field formats (numbers, text, lists, …)
  • Possibility to charge for expensive materials based on consumption
  • Etc…
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SLIDE 6 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

User experience

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SLIDE 7 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

User experience

  • Login screen (existing LabManager)
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SLIDE 8 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

User experience

  • After login: Process data log appears automatically …
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Shows log data for previous use of tool Input for current use

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SLIDE 9 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

User experience

  • Ready for input. Start time, user and project already set.
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SLIDE 10 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

User experience

  • User entering data: Now or after use.
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Data entered New line added

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SLIDE 11 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

User experience

  • Full process log available. Only users own data editable. Possible to download as csv-file.
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Export to csv file

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SLIDE 12 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Searches

  • Search/filtering possible in Process log table
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Filtering fields

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SLIDE 13 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Searches

  • Sample tracking across different tools for projects possible
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SLIDE 14 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Staff interface

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SLIDE 15 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Staff interface to set-up

  • Individual configurable for each tool
  • Free choice of parameter name and type
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SLIDE 16 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Staff interface to set-up

  • Types (unit):
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SLIDE 17 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Staff interface to set-up

  • Types (unit):

– Number: entered with their used unit: e.g. nm, Watt, mbar, … – Text: multiline text fields – List+: Dropdown fields – Calc: calculated field based on data from previous line entry or current

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SLIDE 18 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Behind the scenes

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SLIDE 19 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Behind the scenes

  • LAMP server running DTU Nanolab LabManager system
  • Process data log is an add-on to existing database
  • Requires only three tables in database:
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LAMP:

  • Linux
  • Apache
  • MySQL
  • PHP

Logline_id Line Usage_id 17 1 3456 18 2 3456 19 1 4356 Parameter_id Tool_id Parameter Type

  • rder

101 43 Substrate list+ 10 102 43 Resist list 20 103 43 Thickness µm 30 104 56 Recipe text ID Logline_id Parameter_id Log data 3007 17 101 Si/SiO2 3008 17 102 AZ 5214E 3009 17 103 1.5 3010 19 104 Ti/Au Process log lines Tool parameters Process log DATA

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SLIDE 20 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Outlook

  • Automatic logging of data for tools

– implemented on one tool where it works fine

  • Alarm (e-mail) when a calculated field reach zero.

– Can as an example be used for chemical baths when they need to be changed.

  • We have ideas for more features, but not the time to implement 
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SLIDE 21 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system

Thank you

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SLIDE 22 DTU Nanolab 17 June 2019 A flexible equipment process datalog and sample tracking system 22