PCS SERVICE FOR SALE FOR SALE Used PHI 660 Scanning Auger PHI 660 - - PowerPoint PPT Presentation

PCS SERVICE

FOR SALE FOR SALE Used Used PHI 660 Scanning Auger PHI 660 Scanning Auger Nanoprobe Nanoprobe

PHI 660 Scanning Auger PHI 660 Scanning Auger Nanoprobe Nanoprobe

ELECTRON BEAM ELECTRON BEAM -

• SAMPLE INTERACTION

SAMPLE INTERACTION

Primary Electron Beam Auger Electron gun Lab6

>Atomic No. 3

Characteristic X-rays

> Atomic No. 4

Volume of Primary Excitation <1 - 3 µm Sample Surface Backscattered Electrons Secondary Electrons

Φ

PCS SERVICE

PCS SERVICE

Coaxial Geometry Coaxial Geometry

• Easy Alignment
• Cylindrical Mirror Analyzer (CMA) for high performance

Auger systems

• The CMA has a well defined, easy to find, focal point

– Uses the elastically backscattered electron spectrum

• Coaxial electron gun and CMA,

– The electron beam is automatically aligned at the CMA focal point

• Only the ion gun must be aligned to the analyzer focal

point

Lab6 cathode Cylindrical Mirror Analyzer Channeltron detector Sample Ion Gun Easy alignment of the electron beam, the analyzer focal point, and the ion beam.

Coaxial Geometry Coaxial Geometry PCS SERVICE

Secondary Electron Image Ni Map In Map

CMA Electron gun

Coaxial Geometry Coaxial Geometry

PCS SERVICE No shadowing!

PCS SERVICE

Auger 660 Description Auger 660 Description

• Lab6 electron column & coaxial CMA
• Sample stage with 10 µm resolution
• Energy Resolution 0.3 % to 2.0%
• Energy range 0 to 3200 eV
• Used System , production year 1991
• System is fully operational
• Maintained under Service contract till 31.12.2004
• PC running windows NT

PCS SERVICE

Auger 660 Description Auger 660 Description

• A high performance ion gun 04-303 A

– provides superior depth profile resolution – Beam Current Density > 600 µA/cm2 – Provides high current density for well-defined sputter craters

PCS SERVICE

Auger 660 Specifications Auger 660 Specifications

• Guaranteed Base Pressure

– <5.0 x 10-10 Torr – UHV pumping 200 l/s

• Minimum Electron Beam Diameter

– < 25 nm at 20 kV

• AES Signal-to-Noise Ratio

– >50:1 at 5 kV Electron beam voltage

• Sensitivity in Pulse Count mode

– > 750 cps

• Maximum Beam Current

– > 10 µA

• Buy this used system from the current LAB location as seen without

any installation coverage or warranty . OR

• Get the system fully refurbished, including installation, latest software,

training and 1 or 2 year warranty coverage. OR

• Choose a mixture of options listed above, you define !

PCS SERVICE

Contact us for further information at

• PCS SERVICE
• Veltenstrasse 18
• 85221 Dachau Germany
• www.pcs-gerstl.de gerstlwilhelm@pcs-gerstl.de
• +49 08131 86952
• +49 08131 85801
• +49 0172 856 4668