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Overview of RMD Silicon Semiconductor Detector Activities Mickel McClish Radiation Monitoring Devices Inc., Watertown, MA USA LIGHT07 Workshop on the Latest Developments of Photon Detectors 2007 www.rmdinc.com OVERVIEW Planar Process


  1. Overview of RMD Silicon Semiconductor Detector Activities Mickel McClish Radiation Monitoring Devices Inc., Watertown, MA USA LIGHT07 Workshop on the Latest Developments of Photon Detectors 2007 www.rmdinc.com

  2. OVERVIEW � Planar Process for Deep Diffused Silicon APDs and Position Sensitive APDs (PSAPDs) � Characteristics of Planar APDs and PSAPDs. � Detector Applications � Positron Emission Tomography (PET) � High-Energy Physics Experiments (LXe) � Homeland Security � SSPM Development � Summary www.rmdinc.com

  3. Planar Process for APD Fabrication Planar: Single- Planar: Single- Planar: Double- Planar: Double- Manual Bevel Manual Bevel Sided Grooves Sided Grooves Sided Sided Grooves Grooves Saw Saw cut cut 560 μ m 560 μ m groove groove N - type N - type N - type N - type N - type N - type P - type P - type Deep Deep Ga Ga diffusion diffusion P - type P - type Front Front and and 280 μ m 280 μ m back etching back etching R Farrell, K.S. Shah, K. Vanderpuye, R. Grazioso, R. Myers, G. Entine, “APD arrays and large- area APDs via a new planar process,” Nuc. Inst. Meth. Phys. Res. A , vol. 442, pg. 171, 2000. www.rmdinc.com

  4. Fabrication for Position Sensitivity -HV K.S. Shah, R. Farrell, R. Grazioso, E. Harmon, E. Karplus, “Position-sensitive avalanche photodiodes for gamma-ray imaging,” IEEE Trans. Nuc. Sci., vol. 49, no. 4, August 2002 www.rmdinc.com

  5. Various APDs and PSAPDs www.rmdinc.com

  6. APD/PSAPD Gain and Noise 8 x 8 mm 2 APD at room temperature (24 ° C) www.rmdinc.com

  7. APD/PSAPD Quantum Efficiency M = 1 www.rmdinc.com

  8. Current Major APD/PSAPD Projects � Medical Imaging � Small Animal PET � UC-Davis (Simon Cherry) � Stanford University (Craig Levin) � UC-SF (Bruce Hasegawa) � High-energy physics experiments � LXe studies at Rice (Uwe Oberlack) and Brown Universities (Rick Gaitskell) � Homeland Security www.rmdinc.com

  9. scintillator ring optical fibers PSAPDs UC-Davis Prototype PET/MRI preamplifiers www.rmdinc.com

  10. Small Animal MR PET/MRI Prototype PET Detector barrel and electronics www.rmdinc.com

  11. PET/MRI Prototype Phantom Images MRI PET ( 18 F) Combined C. Cantan, Y. Wu, M.S. Judenhofer, J. Qi, B.J. Pichler, S.R. Cherry, “Simultaneous acquisition of multi-slice PET and MR images: initial results with a MR-compatible PET scanner,” J. Nucl. Med., vol. 47, no. 12, pp. 1968-1976, Dec. 2006. www.rmdinc.com

  12. Small Animal SPECT Mouse heart phantom images SPECT module comprised of 4 x 4 array of 8 mm PSAPDs. Still under construction. www.rmdinc.com

  13. Detector for dark matter search? • LXe scintillation signals can be very small for lower energy events, favoring a photodetector with higher QE than that available in PMTs • PMTs can have relatively high background due to radioactivity • PMTs can be fragile and break due to the thermal stresses experienced in the presence of cold xenon liquid or gas • Tiled PMTs can possess significant dead space www.rmdinc.com

  14. Liquid Xenon Studies Biasing Pins Teflon Encasement Basic Setup at Rice University www.rmdinc.com

  15. Liquid Xenon Studies U. Oberlack, "Avalanche Photodiodes as Photosensors for Liquid Xenon Scintillation Light," IEEE Nuclear Science Symposium, San Diego, Oct. 30 2006 www.rmdinc.com

  16. Liquid Xenon Studies Measurements performed by Dr. Rick Gaitskell’s group at Brown University. www.rmdinc.com

  17. Homeland Security Monitoring the spread of nuclear materials requires scintillation based gamma-ray spectrometers to possess high sensitivity and high resolution. 14 x 14 mm 2 blue-UV 50 mm diameter LaBr 3 :Ce sensitive APD www.rmdinc.com

  18. 5 Ω -cm APD Gain, Noise, and QE 8 x 8 mm 2 APD at room temperature (24 ° C) M = 1 www.rmdinc.com

  19. LaBr 3 :Ce based APD Spectrometer Prototype Coaxial HV cable SHV package Detector and scintillator housing www.rmdinc.com

  20. LaBr 3 :Ce APD Spectroscopy 137 Cs 22 Na 57 Co www.rmdinc.com

  21. SSPM Development 1 P.E. pulse 2 P.E. pulse 2 nd generation Research SSPMs Single P.E. spectrum Four quadrants, each having different pixel geometries & fill factors. The CMOS chip is 3 x 3 mm 2 , with each quadrant 1.5 x 1.5 mm 2 www.rmdinc.com

  22. Summary � Silicon APD and PSAPD technology is advancing & improving. Development & application is proceeding in… � Medical Imaging (PET and SPECT) � Physics research (LXe based systems) � Homeland security � CMOS SSPM technology is being actively researched at RMD. Our 2 nd generation SSPM units are currently being characterized. www.rmdinc.com

  23. Extra Slide www.rmdinc.com

  24. Extra Slide A uniform flood image and energy spectrum of a 7 x 7 CsI:Tl array with 3 mm pixels coupled to a 28 x 28 mm 2 PSAPD while cooled to -20 ° C and irradiated with 57 Co (122 keV) A uniform flood image and energy spectrum of a 7 x 7 LSO array with 3 mm pixels coupled to a 28 x 28 mm 2 PSAPD while cooled to - 20 ° C and irradiated with 22 Na (511 keV) www.rmdinc.com

  25. Extra Slide 10 4 1000 Electronic 800 Pulser 10 3 counts APD Gain 600 Pulsed LED 400 10 2 200 0 10 1 0 5 10 15 20 25 30 900 1000 1100 1200 1300 1400 1500 charge (electrons) Detector Bias [Volts] 45 cm 2 APD noise and optical 45 cm 2 APD gain vs. bias at detection at 77 °K. Noise = 0.8 77 °K. electrons-RMS. M. McClish, K.S. Shah, R. Farrell, F. Olschner, M. Squillante, “Characterization of very large silicon avalanche photodiodes,” IEEE NSS Conf. Rec. , Oct. 16-24, 2004, Rome, Italy. www.rmdinc.com

  26. Extra Slide www.rmdinc.com

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