In-Situ Correlative AFM/SEM/FIB Analysis of Nanostructures and - - PowerPoint PPT Presentation

Seeing and Feeling at the Nanoscale

TEC

In-Situ Correlative AFM/SEM/FIB Analysis of Nanostructures and Ion-Beam Treated Samples

C.H. Schwalb1, P. Frank1, S. Hummel1, J. Sattelkow3, R. Winkler3, G. Hlawacek4, G.E. Fantner2, H.Plank3

1GETec Microscopy GmbH, Vienna, AUSTRIA 2EPFL, Lausanne, SWITZERLAND 3FELMI, University of Graz, AUSTRIA 4Helmholtz Center, Dresden, GERMANY

Seeing and Feeling at the NanoscaleŸ 2

TEC

GETec Microscopy GmbH

Why do we believe in Correlative Analysis …?

Al Si Au

Wha What you u typic pically ally see as as an an SEM us user… Wha What you u typic pically ally see as as an an AFM us user…

AFSEM™

SEM EDX Topography Conductivity

Seeing and Feeling at the NanoscaleŸ 3

TEC

GETec Microscopy GmbH

How can you find the interesting spot on this sample …?

Seeing and Feeling at the NanoscaleŸ 4

TEC

GETec Microscopy GmbH

50 µm 10 µm

Direct ct acce ccess to 3D t 3D topogr graphy in in the SEM

Sample courtesy: G. E. Fantner, EPFL, Lausanne

Interactive Correlative SEM/AFM analysis of bone tissue

Seeing and Feeling at the NanoscaleŸ 5

TEC

GETec Microscopy GmbH

Interactive Correlative SEM/AFM analysis of bone tissue

50 µm 10 µm

Direct access to 3D topography in the SEM

AF AFM hei eight cros

• ss sec

ection

• n

Sample courtesy: G. E. Fantner, EPFL, Lausanne

Seeing and Feeling at the NanoscaleŸ 6

TEC

GETec Microscopy GmbH

SEM, FIB, EDX, EBSD and AFM – A Perfect Fit …

2.

• 2. Seamless Integration
• n

Dedicated scanner design 1.

• 1. Self-se

sensi sing cantilevers Electrical cantilever readout AFSEM™ does NOT interfere with „normal“ SEM operation AFSEM™ goes to the sample – wherever it is… AFSEM™ enables interactive correlative analysis (image < 1 min) 4.

• 4. Matching imaging speed

tSEM = tAFM 3.

• 3. Easy and intuitive handling

AFSEM™ analysis in the SEM How to quickly get to the first correlative AFM/SEM image

a dedicated AFM solution for SEM …BUT, it requires

Seeing and Feeling at the NanoscaleŸ 7

TEC

GETec Microscopy GmbH

Self-Sensing Cantilever Platform

Cantilever Platform

EBD Standard Magnetic

5 mm

Diamond Conductive Thermal

Seeing and Feeling at the NanoscaleŸ 8

TEC

GETec Microscopy GmbH

Nanomechanics of free-standing nanowires

Seeing and Feeling at the NanoscaleŸ 9

TEC

GETec Microscopy GmbH

Nanomechanics of free-standing nanowires

• SEM is crucial for positioning
• f cantilever tip on nanowire
• AFSEM™ is crucial for

measurement of force- distance curves on free- standing nanowires structures

• True interactive experiment

Seeing and Feeling at the NanoscaleŸ 10

TEC

GETec Microscopy GmbH

3D subtractive tomography

Seeing and Feeling at the NanoscaleŸ 11

TEC

GETec Microscopy GmbH

FIB-assisted nanomechanical 3D reconstruction

Layer-by-layer nanomechanical analysis 3D reconstructed nanomechanical properties

…

Seeing and Feeling at the NanoscaleŸ 12

TEC

GETec Microscopy GmbH

AFSEM™ & He-Ions

Co Correlativ lative Interactiv active Analy nalysis is by merging the currently most advanced high-resolution triple-ion microscope with the unique capabilities of the AFSEM™ In Integration i in O ORIO ION Na Nanofab HIM HIM i image o

• f c

cantilever

Seeing and Feeling at the NanoscaleŸ 13

TEC

GETec Microscopy GmbH

In-Situ Correlative Analysis of Helium-treated samples

Implanted He bubbles in Si Silicon Nano-Pillars Cross-linked PMMA

Seeing and Feeling at the NanoscaleŸ 14

TEC

GETec Microscopy GmbH

Working with combined strengths

Seeing and Feeling at the NanoscaleŸ 15

TEC

GETec Microscopy GmbH

MFM cantilever fabrication

500 nm 200 nm

• CoFe tip deposition
• Magnetic tip radius approx. 10 nm

Magnetic „Super“-tip allow for high-resolution magnetic imaging

Seeing and Feeling at the NanoscaleŸ 16

TEC

GETec Microscopy GmbH

MFM image of FEBID CoFe disk/ring structure

SEM image of nanoscale in-situ 3D-printed magnetic CoFe structures AFM topography MFM signal 200 nm 3D topography with MFM signal overlay

100 nm 100 nm

Seeing and Feeling at the NanoscaleŸ 17

TEC

GETec Microscopy GmbH

Correlative MFM of Nanomagnets

500 nm

Seeing and Feeling at the NanoscaleŸ 18

TEC

GETec Microscopy GmbH

Correlative Analysis – Application Examples in SEM or Dual-beam

Fracture Mechanics

Localize fracture points with SEM and analyze in detail with the AFSEM™

Nano-Indentation

Analyze surface changes after nano- indentation with sub-nm resolution

Correlative AFM & EBSD

Correlative SEM, EBSD and AFM analysis of ceramic materials

Electrical Characterization

Measure simultaneously topography AND spreading resistance

Seeing and Feeling at the NanoscaleŸ 19

TEC

GETec Microscopy GmbH

AFSEM™ enhances YOUR SEM/Dual-beam

Cor Correlative Micros

• scop
• py

Direct in-situ 3D-topography and roughness analysis without breaking vacuum

To Topography and elemental analysis

Measure shape and composition of your structures

AF AFM & con

• nductivity or
• r magnetic prop
• per

erties es

Measure the conductivity/magnetic properties

• f your structures with nanometer resolution

AF AFM stiffn fnes ess analysis

Measure the nano-mechanical properties of your structures

?

Your Application …?

Fo For more information vi visit t us …

http://www.getec-afm.com/

TEC