greateyes THE EYE CANT SEE The Berlin Company for Scientific - - PowerPoint PPT Presentation

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greateyes THE EYE CANT SEE The Berlin Company for Scientific - - PowerPoint PPT Presentation

Nov 30, 2023 13 likes •297 views

DISCOVER WHAT greateyes THE EYE CANT SEE The Berlin Company for Scientific Cameras and Inspection Systems DISCOVER WHAT greateyes THE EYE CANT SEE Overview I. Company facts II. Scientific cameras for X-ray, EUV, and VUV applications

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greateyes

The Berlin Company for Scientific Cameras and Inspection Systems

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Overview

I. Company facts

  • II. Scientific cameras for X-ray, EUV, and VUV applications
  • III. Scientific cameras for NIR, VIS, and UV applications
  • IV. New class of Scientific Superresolution Cameras
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greateyes

„greateyes develops, manufactures and markets high performance digital cameras as well as optical inspection systems for the solar industry.“

  • Founded in 2008
  • Currently 18 employees
  • Headquarter in Berlin, local partners in 19 countries
  • Two business units: (I) scientific cameras, (II) inspection systems
  • International customer base – mainly in Asia, Europe, and the U.S.
  • Winner of Innovation Award Berlin-Brandenburg 2010
  • Focus on innovations
  • Powerful cooperation partners (joint R&D projects with Humboldt-Universität Berlin, Max-Born-

Institute,DLR,..)

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Science and Technology Park Berlin Adlershof

Helmholtz Institute Helmholtz Institute Humboldt-University Humboldt-University Max-Born Institute Max-Born Institute Fraunhofer Institutes Fraunhofer Institutes

greateyes GmbH greateyes GmbH

BESSY Accelerator Ring BESSY Accelerator Ring German Aerospace Centre (DLR) German Aerospace Centre (DLR) Physikalisch-Technische Bundesanstalt Physikalisch-Technische Bundesanstalt

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Global Partners

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  • High quantum efficiency

from NIR to X-ray

  • Low readout noise
  • Deep cooling
  • High dynamic range
  • Compact design
  • Broad portfolio
  • Customized solutions

Scientific high-performance CCD cameras

→ More than 50 different cameras for X-Ray, EUV, UV, VIS and NIR applications → Pixel arrays: 1024 × 1024, 1024 × 256, 2048 × 512, 2048 × 2048, and 4096 × 4096 → Read noise of 2.4e-, Cooling down to -100°C, 16/18 bit ADC

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Advantages of greateyes cameras

  • Wide portfolio of >50 different camera models
  • Unmatched noise performance
  • Very attractive cost-performance structure
  • Great flexibility: sensor plane position, tilted

sensor, …

  • Small camera footprint (integration into small

systems)

  • Customer satisfaction (quick support, small

charges)

  • Constant innovation and improvement of products
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greateyes

Spectral Sensitivities in the EUV and Soft X-Ray Range

Photon Energy in eV

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Scientific CCD Camera Portfolio

NIR / VIS / UV

➔ window flange series ➔ vacuum head ➔ more than 20 models

EUV & Soft X-Ray Detectors

➔ vacuum flange series ➔ more than 15 models ➔ in-vacuum series ➔ more than 10 models ➔ wafer-scale camera

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greateyes Cameras - Fields of Application

Applications:

  • Lithography
  • Bioluminescence
  • Electroluminescence
  • Photoluminescence
  • Raman spectroscopy
  • Echelle spectroscopy

Applications:

  • X-Ray/EUV spectroscopy
  • Plasma spectroscopy
  • In-vivo Imaging

Facilities:

  • Synchrotron / beamlines
  • XFEL
  • Physic laboratories

Science Industry

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► compact size ► various vacuum flanges ► sensor sizes up 4 megapixel ► up to 98% quantum efficiency ► minimum read noise level of 2.4 e- ► full-well capacity up to 700,000 e- ► software-selectable gain settings ► deep sensor cooling down to -100°C

EUV and Soft X-Ray Detectors: Vacuum Flange Series

Small Format Large Format

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EUV and Soft X-Ray Detectors: In-Vacuum Series

► compact size ► complete stainless steel housing ► combined electrical/cooling feedthroughs ► vacuum compatibility <1x10-7 mbar ► deep sensor cooling down to -80°C ► up to 98% quantum efficiency ► full-well capacity up to 700,000 e- ► software-selectable gain settings

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Customized EUV and Soft X-Ray Cameras

► modification on customer demand ► customized position of focal plane relative to flange ► customized angle of sensor relative to flange plane ► various flange types: i.e. CF DN160 with integrated exhaust tube for UHV applications

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Customized EUV and Soft X-Ray Cameras: In-Vacuum Series

► modification on customer demand ► modification of adapter flange for integrating in laboratory setups ► modification of chiller connections to different directions ► modification of electrical connections ► customized position of focal plane relative to flange & customized angle of sensor

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► wafer-scale CCD: 60 mm x 60 mm ► 4096 x 4096 Pixels, 15 µm pixel size ► CF DN160 flange with pumping pipe ► four amplifier read out ► minimum read noise of 3 e- ► full-well capacity up to 350,000 e- ► multistage thermoelectric cooling ► deep cooling down to -90°C

EUV and Soft X-Ray Detectors: Wafer-Scale Camera

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greateyes

DISCOVER WHAT THE EYE CANʻT SEE Many beamlines do work with a scintillator (e.g. a phosphor screen) in front of the camera. Advantage: Cost attractive CMOS cameras can be used (scintillators emit much light) Disadvantage: Photon scattering Direct detection without scintillator: Upgrading to a scientific CCD cameras will increase the system's resolution and sensitivity → additional spectral lines might be discovered

  • Prof. Davide Bleiner, EMPA Switzerland, Department Short

Wavelength Plasma Radiation

XUV Spectroscopy: Phosphor-Screen Camera vs. greateyes XUV camera

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greateyes

DISCOVER WHAT THE EYE CANʻT SEE Soft X-ray or EUV spectroscopy using a laser-plasma source is one key application. The application is kind

  • f new as experiments in this spectral range were

previously only possible with synchrotron radiation sources. In the image a greateyes GE 2048 512 BI is employed to measure: 1) the emission spectra of the soft X-Ray source (100- 1300 eV) utilising a transmission grating spectrometer 2) beam properties by direct imaging of the beam utilizing a pin hole

  • I. Mantouvalou, K. Witte, W. Martyanov, A. Jonas, D. Grötzsch, C. Streeck, H. Löchel, I. Rudolph, A. Erko, H. Stiel and B. Kanngießer,

Single shot near edge x-ray absorption fine structure spectroscopy in the laboratory, Appl. Phys. Lett. 108, 201106 (2016)

Soft X-ray and EUV spectroscopy using a laser-plasma source

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NIR, VIS and UV Detectors: Standard Flange Series

Small Format Large Format

► compact size ► standard camera flanges ► sensor sizes up 4 megapixel ► up to 98% quantum efficiency ► minimum read noise level of 2.4 e- ► full-well capacity up to 700,000 e- ► software-selectable gain settings ► deep sensor cooling down to -60°C

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DISCOVER WHAT THE EYE CANʻT SEE Background:

  • fluorochromes are excited by an external light source
  • response: light emission of a different wavelength
  • emitted fluorescence can be detected by using a camera

which is sensitive in the near-infrared spectral range Example: detection of cancer cells in the lymph nodes of

  • rodents. For this purpose, a fluorescence labelled dye is

applied intravenously into rats. Typical exposure times are long (>5 minutes) → superior cooling performance of the camera is crucial

Fluorescence in vivo Imaging

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New: Scientific Super-Resolution Cameras

► New class of scientific cameras ► Innovative product ► Patented technology ► Sub-pixel resolution ► Available for all greateyes cameras from NIR to X-ray

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Design and Operation: Novel Scientific Superresolution Camera

Exploded Assembly Drawing / Patents pending Thermal Conductors Peltier Element Image Sensor Piezo Unit Move Sensor Image Acquisition Calculate Shift Between Images Superresolution Algorithm Superresolution Image

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Spatial Resolution vs. Dynamic Range

Trade-off Pixel Size vs. Dynamic Range low dynamic range high spatial resolution high dynamic range low spatial resolution

Fluorescence images Tilia spec. Source: Leica Microsystems

Full Well Capacity pixel size pixel size

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Original

1951 USAF Resolution Test Chart Sensor: 1024 x 1024 BI 4x4 sub-pixel shift → Resolution: 2.6 times higher compared to original image

Superresolution Interpolation Reference

Scientific Superresolution Camera: Test Chart (VIS spectral range)

Max Born Institute

Original

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Scientific Superresolution Camera: Zone Plate (X-Ray spectral range)

Photon Energy = 1200 eV Dr = 25 nm Original Image: 1024 x 1024 44 nm / pixel Superresolution Image: 4096 x 4096 11 nm / pixel 3-times oversampling

Superresolution Image 4x4 sub-pixel shift Original Image no sub-pixel shift

Stiel, H., J. Braenzel, A. Dehlinger, R. Jung, A. Luebcke, M. Regehly, S. Ritter, J. Tuemmler, M. Schnuerer, C. Seim Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts. SPIE 10243: p. 1024309-1024309-10 (2017)

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+ High performance modular camera platform + Patented camera technology + Complete in-house value chain: design, manufacturing, and testing + 24/7 proven functionality + World-wide sales; international network of sales representatives / distributors

Thank you!

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greateyes

DISCOVER WHAT THE EYE CANʻT SEE Selected references: → http://greateyes.de/en/applicationsCCDCameras.html

  • M. F. Nawaz, M. Nevrkla, A. Jancarek, A. Torrisi, T. Parkman, J. Turnova, L. Stolcova, M. Vrbova, J.

Limpouch, L. Pina and P. Wachulak, Table-top water-window soft X-ray microscope using a Z-pinching capillary discharge source, JINST, 2016, Vol. 11 PO7002

  • I. Mantouvalou, K. Witte, W. Martyanov, A. Jonas, D. Grötzsch, C. Streeck, H. Löchel, I. Rudolph, A.

Erko, H. Stiel and B. Kanngießer, Single shot near edge x-ray absorption fine structure spectroscopy in the laboratory, Appl. Phys. Lett. 108, 201106 (2016)

  • S. Fazinić, I. Božičević Mihalić, T. Tadić, D. Cosic, M. Jakšić, D. Mudronja, Wavelength dispersive

µPIXE setup for the ion microprobe, Nucl. Instr. Meth. Phys. Res. Sec. B, 2015, Vol. 363, pages 61-65

  • A. Hafner, L. Anklamm, A. Firsov, A. Firsov, H. Löchel, A. Sokolov, R. Gubzhokov, and A. Erko,

Reflection zone plate wavelength-dispersive spectrometer for ultra-light elements measurements, Opt. Express, 2015, Vol. 23, No. 23:29476-29483

  • P. W. Wachulak, A. Torrisi, A. Bartnik, D. Adjei, J. Kostecki, L. Wegrzynski, R. Jarocki, M. Szczurek, H.

Fiedorowicz, Desktop water window microscope using a double stream gas puff target source, Applied ‑ Physics B, 2015, 118:573–578