Grazing incidence X-ray fluorescence analysis of Pr doped Silicon - - PowerPoint PPT Presentation

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Grazing incidence X-ray fluorescence analysis of Pr doped Silicon - - PowerPoint PPT Presentation

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Grazing incidence X-ray fluorescence analysis of Pr doped Silicon Rich Silicon Oxide films G. Pepponi 1 , M. Morales 2 , K. R. Dey 2 , F. Gourbilleau 2 , D. Chateigner 3 , M. Bersani 1 , S. Pahlke 4 , D. Ingerle 5 1 Fondazione Bruno Kessler,

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SLIDE 1

Grazing incidence X-ray fluorescence analysis

  • f Pr doped Silicon Rich Silicon Oxide films

1 Fondazione Bruno Kessler, Centre for Materals and Microsystems, Micro-Nano Analytical Laboratory, Via Sommarive 18, 38123 Povo, Trento, Italy 2 CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Boulevard du Maréchal Juin, 14050 Caen Cedex 4, France 3 CRISMAT, ENSICAEN, IUT-Caen, Université de Caen Basse-Normandie, 6 Boulevard du Maréchal Juin, 14050 Caen, France 4 KETEK GmbH, Hofer Str. 3, 81737 München, Germany 5 Atominstitut, Technische Universität Wien, Stadionallee 2, 1020 Vienna, Austria

  • G. Pepponi1, M. Morales2, K. R. Dey2, F. Gourbilleau2,
  • D. Chateigner3, M. Bersani1, S. Pahlke4, D. Ingerle5
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SLIDE 2

Introduction – Si solar Cells

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

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SLIDE 3

Introduction – Si solar Cells

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

classical efficiency limit is currently estimated to be 29%

  • C. Strümpel et al. Solar Energy Materials and Solar Cells

Volume 91, Issue 4, 15 February 2007, Pages 238-249

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SLIDE 4

Introduction – Si solar Cells

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Spectral modifications to increase efficiency downconversion upconversion

  • C. Strümpel et al. Solar Energy Materials and Solar Cells

Volume 91, Issue 4, 15 February 2007, Pages 238-249

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SLIDE 5

SRSO:Pr deposition

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Nanostructures Intégrées pour la Microélectronique et la PHotonique ( NIMPH) CIMAP, Caen, France The NIMPH team develops thin films for photonics, semiconductor or conductive, doped with rare earth (and/without) nanostructured sensitisers

Pr doped Silicon Rich Silicon Oxide

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Samples

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

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Characterisation

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Functional Analysis : typically photo-luminescence Structural / Elemental analysis?

modelling uses the same formalism GI-XRF is a further development sensitive to electron density and its changes:

  • material density
  • film thickness
  • optical constants
  • roughness

reveals elemental surface concentrations:

  • material composition
  • in depth information
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SLIDE 8

Experimental set-up

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Panalyical X'Pert XRD Problem: SD detector not integrated in the X'Pert system: synchronisation Solution: XRR acquisition in continuous mode, angles calculated from time-stamp and live time

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Experimental results

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Sample D007 annealed at 900ºC for 10'

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Experimental results

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Sample D022 – power 100W Sample D023 – power 200W

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Experimental results

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Sample D022 – power 100W annealed at 900°C for 10'

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SLIDE 12

Experimental results

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Sample D048, 0 Pr6O11 chips, power 200W

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Experimental results

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Sample D050 – H2 0 Pr6O11 chips Sample D05

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SLIDE 14

Experimental results

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Sample D071 – 10 sccm H2 11 Pr6O11 chips Sample D0

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SLIDE 15

Experimental results

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

Sample D080 – 10 sccm H2 0 Pr6O11 chips Sample D082 – 2 Power 60W

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Experimental results – chamber C2

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

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Experimental results – chamber C2

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

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X-Ray Tube spectra

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

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X-Ray Tube spectra

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

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X-Ray Tube spectra

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

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Angle dependence Polychromatic excitation

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

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Angle dependence Layered samples

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

  • interlayer and intralayer secondary fluorescence enhancement
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Conclusions

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

  • an easy solution for adding gi-xrf to xrr was shown
  • qualitative GIXRF is quite “straight forward”
  • detect possibly detrimental contamination
  • get qualitative information on layer distribution

Future work and perspectives

  • try to get quantitative
  • combine XRR and GIXRF in a single fit
  • carry out measurements at different wavelengths (e.g. MoKα and CuKα)
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SLIDE 24

Acknowledgements

TXRF 2011 – Dortmund - SRSO:Pr – Giancarlo Pepponi

This research was partially carried out within the Xmat project (“Combination of X-Ray diffraction and X-Ray Fluorescence techniques in material science”), supported by the Provincia autonome di Trento and the European Union in the framework of the Marie Curie COFUND program - Call for proposals 4 - researcher 2009 – Outgoing.

Thanks for your attention

Authors than KETEK GmbH and the Pahlke clan for providing an SDD detector (100 mm²)