Delivering Sensor & Microelectronic Solutions Worldwide Over - - PowerPoint PPT Presentation

▶
delivering sensor microelectronic solutions worldwide
SMART_READER_LITE
LIVE PREVIEW

Delivering Sensor & Microelectronic Solutions Worldwide Over - - PowerPoint PPT Presentation

Dec 30, 2023 208 likes •762 views

Delivering Sensor & Microelectronic Solutions Worldwide Over 500 million die shipped per year www.semefab.com www.semefab.com >500 Million die shipped per year Our Vision To put Semefab at the heart of todays life enhancing

slide-1
SLIDE 1

>500 Million die shipped per year www.semefab.com

Over 500 million die shipped per year

Delivering Sensor & Microelectronic Solutions Worldwide…

www.semefab.com

slide-2
SLIDE 2

>500 Million die shipped per year www.semefab.com

To put Semefab at the heart of today’s life enhancing semiconductor and MEMS sensor products. To be your MEMS & IC foundry.

Our Vision

slide-3
SLIDE 3

>500 Million die shipped per year www.semefab.com

Semefab have an impressive track record of process development, process induction and volume foundry supporting silicon based MEMS, CMOS, ASIC, Bipolar-Linear & Discrete semiconductor device technologies.

An Impressive Record Since 1986

1986

Fab1 Operation 100mm CMOS IC‘s Bipolar transistors

1989 1992 1994 1998 2002 2005 2008 2011 2016

Swiss Watch IC's South Africa Post Office Telephone Dialler IC's CMOS ASICs for Automotive & Security Queen's Award for Export Precision Op Amp foundry JFET for PIR2000 Queen's Award International Trade JFET for PIR MEMS Pressure Fab 2 (MEMS) Operational 100mm MEMS Thermopile MEMS Gas Sensor MNT Award £6.8M DIBiCMOS Foundry Precision Analogue IC's New Fab 2 150mm MEMS Blood Viscosity Fab 3 Operational 150mm ALS for CCTV MEMS Blood Analysis 30th Anniversary USA & China Representation established

slide-4
SLIDE 4

>500 Million die shipped per year www.semefab.com

Global Reach, >80% Exports

slide-5
SLIDE 5

>500 Million die shipped per year www.semefab.com

  • Semefab operates 3 wafer fabs on a single site in Glenrothes, UK,

across a broad technology base of MEMS sensors and CMOS & Linear IC's, Discrete semiconductor devices.

  • Close liaison with our highly experienced process engineering team

ensures a successful outcome to process development/induction and process optimisation leads to high yield, cost effective manufacture. ‘For your semiconductor device or technology requiring fabrication, make Semefab your first call.’

Delivering Sensor & Microelectronic Solutions Worldwide…

slide-6
SLIDE 6

>500 Million die shipped per year www.semefab.com

OUR SERVICES

  • MEMS Foundry
  • IC Foundry
  • Discrete Semis
  • Semefab products
slide-7
SLIDE 7

>500 Million die shipped per year www.semefab.com

Cantilever Structure Courtesy of: Microvisk Technologies Inc.

Limited Illustration – much of our foundry portfolio is customer proprietary

Extensive Process Portfolio

slide-8
SLIDE 8

>500 Million die shipped per year www.semefab.com

slide-9
SLIDE 9

>500 Million die shipped per year www.semefab.com

  • We operate in diverse market sectors on a global scale.
  • Stable business - when one sector of region is down it is often

compensated for in other areas.

  • Strong track record across diverse sectors. Inc. Automotive, Security,

Medical, Industrial, Energy and Consumer sectors.

  • Global customer base. Europe, North America and Far East.

Our Strengths

‘Each day, Semefab silicon makes a positive contribution to people‘s modern lifestyle and improves their environment, security and safety.’

slide-10
SLIDE 10

>500 Million die shipped per year www.semefab.com

Semefab Overview

Commercial Foundry CMOS/Bipolar Foundries – 6” & 4” MEMS Foundry – 6” & 4” Ship >500 million die/year Design & Development Partnerships Technology Inductions Established 1986 Global Fabrication Player ≈89% Export Bias >35 Customers Worldwide £12.4M T/0, 5-10% PBT 108 Employees

slide-11
SLIDE 11

>500 Million die shipped per year www.semefab.com

Foundry Operations

Fab Operations: Fab 3: 6” MOS/Bipolar to 0.8µm Fab 2: 6” & 4” MEMS to 0.8µm Fab 1: 4” MOS/Bipolar to 2.5µm Probe & Test Operation ISO9001, ISO14001 UL & ESA Approval Diverse Process Portfolio: MEMS Si Gate CMOS & Opto CMOS Metal Gate CMOS & PMOS DI Complementary Bipolar DI BiCMOS Linear Bipolar PiN Photo Diode Lateral FET Low Noise N Channel JFET DMOS RF MOSFET Power Bipolar Fast Recovery Diode

slide-12
SLIDE 12

>500 Million die shipped per year www.semefab.com

Production Capacity

Fab 3: 25,000 6” wafers per year capacity, potential 75,000 Fab 2: 25,000 4”/6” wafers per year capacity Fab 1: 50,000 4” wafers per year capacity Probe & Test: Test floor supports wafer test & package test Electrical parametric testing Sensor functional testing e.g. low pressure etc. Assembly: Subcontracted to Far East Final Test: In house or Far East

slide-13
SLIDE 13

>500 Million die shipped per year www.semefab.com

Device Applications Served

ASIC & IC Foundry :

Opto CMOS ASIC Optical Smoke Detector OptoCMOS ASIC + FILTER Light Sensing & Switching OptoMCMOS Hazard Flasher CMOS ASIC Smoke detector address MCMOS ASIC Garage Door Opener CMOS ASIC Automotive Windscreen Wiper CMOS ASIC Automotive Window Lift CMOS ASIC EC Motor Controller Interface. CMOS Foundry Secure Telecoms DI BICMOS Precision Op-Amps Linear Array Solar battery charger controller Precision analogue Operational Amplifiers Ambient Light Sensor CCTV Cameras

slide-14
SLIDE 14

>500 Million die shipped per year www.semefab.com

Device Applications Served

Discretes:

JFET PIR Motion Sensors PIN DIODE Light Sensing LATERAL MOSFET Audio Power Amplification BIPOLAR POWER Power Devices & Module FRD Power Devices & Module RFMOSFET RF Base Stations & PMR PHOTODIODE ARRAY Precision Measurement SiC Schottky Diode Power Converters

slide-15
SLIDE 15

>500 Million die shipped per year www.semefab.com

1GHz RF LDMOS Cross Section

slide-16
SLIDE 16

>500 Million die shipped per year www.semefab.com

Device Applications Served

MEMS Foundry: NO2 & CO detectors Automotive Air Quality Pressure Sensor 1 Bar Automotive Engine Management Pressure Sensor Altimeter, Diving, Industrial Pressure Sensor mBar Medical –respiratory Thermopile Non contact temperature & NDIR gas sensing Liquid Viscosity Sensor Blood coagulation Gas Thermal conductivity Gas flow measurement

slide-17
SLIDE 17

>500 Million die shipped per year www.semefab.com

Blood Viscosity Sensor

slide-18
SLIDE 18

>500 Million die shipped per year www.semefab.com

Projects in Development

MEMS micro hotplate MEMS ToF liquid flow sensor TCIGBT 1.2kV Bizen – Smart Power HP Thermopile Harsh Media Pressure Sensors Strain Gauge MEMS Mirror

slide-19
SLIDE 19

>500 Million die shipped per year www.semefab.com

Global Business Distribution

CMOS & Bipolar IC 36% DISCRETE 25% MEMS 39%

FY2020

slide-20
SLIDE 20

>500 Million die shipped per year www.semefab.com

Global Business by Region

USA 23% Asia 19% Europe 37% UK 21%

FY2020

slide-21
SLIDE 21

>500 Million die shipped per year www.semefab.com

Customer Distribution

FY2020

slide-22
SLIDE 22

>500 Million die shipped per year www.semefab.com

Fab3 Mos/Bipolar 150mm

slide-23
SLIDE 23

>500 Million die shipped per year www.semefab.com

Diffusion area Service area Etch Area Photo area Service area Changing area Service area corridor STACK C Source Cabinet STACK B Source Cabinet STACK A Source Cabinet WB WB RD RD insp insp insp Q T Z C L N Q T Z D R Y Q T Z S T R wip wip insp Pumps Pumps Pumps e m s e m s insp e m s load insp P E 6 P E 5 P E 6 C a tc h c u p S T E P P E R S T E P P E R C & D c
  • a
t C & D d e v L P 3 P E 6 K S c h e m i c a l c h e m i c a l T r a c k p a r t s S p u t t e r p a r t s insp N i k
  • n
N e x i V C h e m ic a l p a s s t h r u p / t insp la m 9 6 la m 4 4 2 la m 4 5 2 D R IE WB WB RD WB WB RD p / t s ts RD WB c 1 5 M rc 6 4 3 3 2 9 4 9 9 3 9 1 1 5 insp PVD & Metal Spares and tooling comp comp ab ate me nt Implanter Implanter Implanter insp wip wip TMX Console TMX Console TMX Console

1500 m2 (15850 sq. ft.) Class 100 Photo, Class 10

Fab3 – 6” CMOS/Bipolar

slide-24
SLIDE 24

>500 Million die shipped per year www.semefab.com

Fab3 – Process Capability

ASML 5500 Stepper to 0.8μm (capable to 0.5μm) Perkin Elmer Projection Alignment to 2.0μm Furnace Stack 1: Oxidation, Oxidation, LPCVD PolySi (in situ Phos dope), Phos deposition Furnace Stack 2: Oxidation, Oxidation, LPCVD Nitride (Std & Low Stress), Boron deposition Furnace Stack 3: Oxidation (SiC), Oxidation, Alloy, LPCVD BP-TEOS Mercury Automated Pre-Diffusion Clean System Wet Etch – BOE, Metal etch, Solvent strip, PDC SVG8800 Coat / Develop Track LAM 4420 Nitride / Poly Etch LAM 4520 Oxide Etch LAM 9600 Metal Etch

slide-25
SLIDE 25

>500 Million die shipped per year www.semefab.com

Fab3 – Process Capability

Varian 3290 Al/1%Si, Al/1%Cu , TiW Sputter with pre-etch Varian 350DE Ion implanter, B, P ,As Varian 180XP High Current Ion implanter, B, P , As STS Pegasus DRIE EVOS 5000 RF etch & Metal Sputter Novellus PECVD Thin Films - SiO2, SiN, SiON

slide-26
SLIDE 26

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-27
SLIDE 27

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-28
SLIDE 28

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-29
SLIDE 29

>500 Million die shipped per year www.semefab.com

Fab3 – 6” CMOS/Bipolar

slide-30
SLIDE 30

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-31
SLIDE 31

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-32
SLIDE 32

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-33
SLIDE 33

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-34
SLIDE 34

>500 Million die shipped per year www.semefab.com

Fab2 MEMS 100mm & 150mm

slide-35
SLIDE 35

>500 Million die shipped per year www.semefab.com

Fab2 – 6” & 4” MEMS

800 m2 (8450 sq. ft.) Class 100

Photo, Class 10

slide-36
SLIDE 36

>500 Million die shipped per year www.semefab.com

Fab2 – Process Capability

ASML 2500 i-Line Stepper to 0.8µm Double side proximity alignment to 2.0µm Furnace Stack: Oxidation; LPCVD PolySi Wet Etch - PDC, HF, BOE, Al etch, Si Etch, Solvent Strip KOH wet etch Acetone & NMP Lift-off MRC Multi-Metal Sputter – Au, TiW, Al, AlSi, AlCu, Ti, Ni, NiCr, Al2O3, Constantan, SiCr, Sn Balzars Evaporation – Cr, Ni ,Pt, Au, Ti, Ta 6” Dry Etch: LAM Rainbow Oxide, Poly/Nitride 4” Dry Etch: LAM Autoetch 490 & 590

slide-37
SLIDE 37

>500 Million die shipped per year www.semefab.com

Fab2 – Process Capability

Novellus PECVD Thin Films - SiO2, SiN, SiON EVG Wafer-Wafer & Wafer-Glass Bonding - Anodic, Eutectic, Fusion SVG8800 Coat/Develop track – bulk dispense SVG8800 Coat/Develop track – syringe dispense Polyimide – coat & bake XeF2 dry etch release of Polysilicon Resist strip dry etch, Matrix 101 Critical point drying CO2 / IPA STS Pegasus DRIE & APS

slide-38
SLIDE 38

>500 Million die shipped per year www.semefab.com

slide-39
SLIDE 39

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-40
SLIDE 40

>500 Million die shipped per year www.semefab.com

slide-41
SLIDE 41

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-42
SLIDE 42

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-43
SLIDE 43

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-44
SLIDE 44

>500 Million die shipped per year www.semefab.com

slide-45
SLIDE 45

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-46
SLIDE 46

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-47
SLIDE 47

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-48
SLIDE 48

>500 Million die shipped per year www.semefab.com

DRIE Test Structures

slide-49
SLIDE 49

>500 Million die shipped per year www.semefab.com

Probe & Test

slide-50
SLIDE 50

>500 Million die shipped per year www.semefab.com

Probe & Test Capability

360m2 (2,691 sq.ft.) Probe & Test Floor Class 100 Operating Environment (Hoods) Reedholm Instruments RI20/RI40 Parametric Tester (3) TPixie Mixed Signal ATE (4) Tesec 8101TT - Discrete Device Tester (3kV/20A) (1) Multitest SOIC / DIP Handlers –40°C to +125°C (5) Electroglas 2001X Wafer Auto-probers (7) Wentworth 1050 Semi-Auto Prober (high-voltage) (1) Thermostream (1)

slide-51
SLIDE 51

>500 Million die shipped per year www.semefab.com

slide-52
SLIDE 52

>500 Million die shipped per year www.semefab.com

slide-53
SLIDE 53

Semefab Ltd. Newark Road South, Eastfield Industrial Estate, Glenrothes, Fife, Scotland, UK, KY7 4NS T: +44 1592 630630 F: +44 1592 775265 E: info@semefab.com W: www.semefab.com

slide-54
SLIDE 54

>500 Million die shipped per year www.semefab.com

Glasgow Airport Edinburgh Airport

DRIE Structure: 2mm x 2mm Semefab Ltd. Newark Road South, Eastfield Industrial Estate, Glenrothes, Fife, Scotland, UK, KY7 4NS T: +44 1592 630630 F: +44 1592 775265 E: info@semefab.com W: www.semefab.com