8/5/2010 Multichannel Flexible and Biocompatible Microelectrode SangHoon Lee Department of Biomedical Engineering, Korea University, Seoul, 136-703, Korea Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 1 Brain Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 2 1
8/5/2010 Recover the broken cord Possible? Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 3 Regeneration Nerve Nerve Nerve Nerve Nerve Nerve Neuronal Circuit? In reality Nerve Nerve POW 10 week/ with Dankook Univ. Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 4 2
8/5/2010 Prosthesis Wiring Possible? Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 5 NMI (Neuron to Machine Interface) Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 6 3
8/5/2010 Concept of BMI J.R. Wolpaw et al. 2002 BCI (BMI): bypasses the brain’s normal pathways of peripheral nerves and muscles Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 7 Duke University Center for Neuro-engineering Neuronal activity is recorded in multiple brain areas and translated to commands to the actuator, via the control computer and multiple decoding algorithms (blue loop). Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 8 4
8/5/2010 Human trial Nature, 442, 2006 Nagle: Quadriplegic patient and the first human volunteer John Donoghue (Brown University in Rhode Island) Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 9 Major application of BMI Sensory Recovery Motion Recovery Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 10 5
8/5/2010 Core technologies for BMI Understanding of brain (neuron) Electrode for Interface THE SIX MILLION DOLLAR MAN Neuro-signal processing Communication Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 11 Focusing on Electrode Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 12 6
8/5/2010 State of the Art u Neural Recording Electrode u Flexible Electrode u Neural Probe with Microfluidic Channel u Micro Electrode for Visual Cortex u 2-D & 3-D Neural Stimulation and Sensing Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 13 Classification of Neural Electrode Shape Hard Materials Silicone UEA, electrode Depth Michigan Electrode Electrode Flexible electrode. Polyimide, PDMS, Neural Parylene Electrode MEA Soft Planar Materials Electrode Regeneration type nerve electrode Cuff Sieve Materials Electrode Electrode Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 14 7
8/5/2010 Depth Type Electrode Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 15 Electrodes for the sub-retinal prosthesis Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 16 8
8/5/2010 Operation of Electrodes for the Rabbit Retina Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 17 VEP (Visual Evoked Potential) & EEP (Electrical Evoked Potential) Test NIHON KOHDEN Neuropack Four mini MEB-5304K VEP ; 200~225 ms EEP ; 75~100 ms Thomas Schanze et. al , Experimental Eye Research (2005) Pig, subretinal New Zealand White Rabbit, subretinal Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 18 9
8/5/2010 Fabrication Fabrication of PI of PI-based electrode process based electrode process Sacrificial layer Al layer - 1000Å 1st polyimide layer 3000rpm - 30sec soft baking 95℃ - 3min UV exposure 150mJ/ ㎠ PEB 95℃ - 3min Develop & rinse Developer : 5min (soak) dry N 2 blowing metal deposition Ti : 500Å, Au : 2500Å metal patterning 3500rpm - 30sec (AZ1512) soft baking 95℃ - 1 min UV exposure 150mJ/ ㎠ develop 1 min Au etching - HCl: HNO 3 =3:1 metal patterning Ti etching - H 2 O: HF: HNO 3 = 50:1:1 Removal PR Acetone - 3min Fig. 1. A schematic overview of polyimide based electrode process. (a) Sacrificial layer (Al). (b) Polyimide for 1 st layer spin-coating and patterning. (c) Metallization (Ti/Au). (d) Polyimide for 2 nd layer spin-coating and patterning. (e) peel-off the polyimide base electrode. (f) Connector connection. Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 19 Platinum Platinum (Pt) electro (Pt) electro- -plating method plating method Electroplating solution Electroplating solution Electroplating solution PDMS * H * H 2 PtCl PtCl 2 : 5g (Chloroplatinic acid, Sigma : 5g (Chloroplatinic acid, Sigma-Aldrich) Aldrich) * Pb (NO * Pb (NO 3 ) : 2 71.4mg (lead acetate, Sigma ) : 2 71.4mg (lead acetate, Sigma-Aldrich) Aldrich) * DI * DI-water : 357mL water : 357mL Method #01 Method #02 Method #03 *Chemical- Chemical- *Ultra-sonic treatment treatment Ultra-sonic TABLE 1. electroplating conditions TABLE 1. electroplating conditions *Chemical-treatment : H 2 SO 4 solution dipping for 20sec *Ultra-sonic : ultra-sonic wave during electroplating process Ultra-sonic wave Applied current density Applied current density ① 0.4mA/cm 0.4mA/cm 2 ② 2.0 2.0mA/cm mA/cm 2 ③ 5.9 5.9m mA/cm A/cm 2 2 Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 20 10
8/5/2010 Electrical Electrical & Mechanical characterization & Mechanical characterization Electrical characterization Electrical characterization Mechanical characterization Mechanical characterization (-) Potentiostat Adhesive tape (+) Reference electrode working electrode Counter electrode Polyimide layer Ti/Au layer (500/2000Å) Glass (1cmx1cm) Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 21 Electrical Electrical & Mechanical characterization & Mechanical characterization a b Fig. 5. (a) measured the impedance of electrode electroplated with method #02. (b) measured the impedance of bare gold, non-electroplated on seed layer. Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 22 11
8/5/2010 Electrodes for Mouse EEG from Skull PCB connector Male SMT Recording site Lever d) Thermocouple b) Heater a) PCB connector holder c) Load cell e) Digital display Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 23 In vivo Evaluation left caudal frontal right c R19 R17 R20 R14 R18 GND R11 C R L20 R15 R13 R8 L19 R12 L10 L18 L15 R5 R9 L17 R7 Ref. L12 R6 L14 R4 L13 L9 R3 L11 R2 L10 L6 L8 L7 R1 L3 L5 L4 L2 L1 d Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 24 12
8/5/2010 Electrodes for IBAN Top PDMS Upper PI sheet layer Ti/Au Why IBAN? pattern EEG Hearing aids Intra- Body Area Bottom Network PDMS Lower PI ECG sheet Glucose layer N sensor Hospital E Contacting Spot T Ambulance W Blood O pressure Connecting Part R Cellular PDMS K phone or Police Wire PDA PDMS Au/Ti Lines Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 25 PI 120µm Potential Applications of IBAN CH 1 CH 2 Time (ns) Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 26 13
8/5/2010 Electrode to Detect Neural Pathway Abnormal Abnormal MU MU MU Cu Wire Silver Ball Metal Mold Ball Cover Single Multichannel Electrode Electrode Tendon #1 PDMS #3 #2 #5 #4 #7 #9 #8 #10 Cu Wire Silver Ball Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 27 Deep Brain Stimulation (1) Gateway of information Dopaminergic pathways of the human brain in normal condition (left) and Parkinson's disease (right). Red Arrows indicate suppression of the target, blue arrows indicate stimulation of target structure. http://www.youtube.com/watch?v=1yCgLythe00&feature=related Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 28 14
8/5/2010 Deep Brain Stimulation (2) http://www.youtube.com/watch?v=WYDoHmg9ECI&feature=related Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 29 Future Work 3D & Hybrid Type Electrodes 3-D Electrode for DBS Hybrid Electrode (Electrode + Drug Delivery) Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 30 15
8/5/2010 Conclusion - High potential applications in medicine - Neural prosthesis - Wireless communication - U-Health - Customer electronic devices Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 31 Applying Autonomics to Create an Intelligent, Ubiquitous Environment Slide 32 16
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