Alexander Schilling Glass. Really a cost issue? Approx. 50% of all - - PowerPoint PPT Presentation

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Oct 24, 2022 367 likes •553 views

NEXT GENERATION IN THE MANUFACTURING OF MICRO FLUIDIC DEVICES in glass, silicon and quartz Alexander Schilling Glass. Really a cost issue? Approx. 50% of all micro fluidic applications are made in

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NEXT GENERATION IN THE MANUFACTURING

OF MICRO FLUIDIC DEVICES
in glass, silicon and quartz
Alexander Schilling

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Glass. Really a cost issue?
Approx. 50% of all micro fluidic applications are made in glass, silicon or glass/silicon
3 of the 5 biggest micro fluidic application are made in glass, silicon or glass/silicon
Prototyping in glass is 10 times cheaper
Price up to a quantity of 100000 pc. is equal
No, it isn‘t a cost issue.

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Next Generation Manufacturing

The combination of new developed and existing processing methods at LTF

leads to unique results and products
which can not be achieved by any other method.

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Multi step hight with mixing structure and holes

100µm 200µm 200µm 300µm 300µm

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Through Glass Vias

silicon wafer with conductive vias insulated by surrounding glass bushings silicon wafer with glass areas including several conductive vias glass wafer including conductive vias

highly doped silicon vias

Glass and Silicon are CTE machted

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TGV wafer

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Structured ¡glass ¡device ¡ Glass ¡device ¡with ¡TGV ¡

Example how to implement TGV

Vacuum tight Conductive 0.01-0.02 Ωcm

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Example how to use TGV

Heat, ¡cool, ¡electricity, ¡thermocouple ¡

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We can do the easy things as well

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Chemical resistance

Heat resistance
High pressure
Optical transparency
UV transmission
Low fluorescence
Bio compatible
Long term stable
Glass facts

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Grinding and polishing

Diamond milling
Wet etching – HF, KOH
DRIE
TGV process
Micro powder blasting
Laser patterning
Water jet cutting
3D Printing
Molding
Metall coatings
Dicing
Packinging
Clean room class 100
LTF offers the whole process chain

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Employees :

70
Location :
Germany

Quality Standard :

TS 16949
ISO 9001
ISO 14001

LTF facts

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Plan Optik Group

Leading manufacturer of structured wafers for MEMS

Microfluidic devices and systems for

Lab on chip and Flow Chemistry

Engineering, rapid prototyping,