Advanced Tool for Dip-Pen Nanolithography: Nano-Fountain Pen - - PowerPoint PPT Presentation

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Advanced Tool for Dip-Pen Nanolithography: Nano-Fountain Pen Keun-Ho Kim Mechanical Engineering Northwestern University USA US-South America Workshop August 6, 2004 Fountain Pen Nanolithography Nano Fountain Active Probe (NFAP) array Appl.

SLIDE 1

Advanced Tool for Dip-Pen Nanolithography: Nano-Fountain Pen

Keun-Ho Kim Mechanical Engineering Northwestern University USA

August 6, 2004 US-South America Workshop

SLIDE 2

2 µm

Micropipette-based atomic force microscopy (AFM) probe

Nano Fountain Active Probe (NFAP) array

August 6, 2004 US-South America Workshop

Dip-pen nanolithography (DPN)

Science 283, 661 (1999) IEEE Trans. on Nanotech. 1 (1), 39 (2002)

Appl. Phys. Lett. 65 (5), 648 (1994)

Fountain Pen Nanolithography

Limitations in DPN – Re-inking – Low speed & low throughput Millipede: parallel read/write Continuous ink-feeding Parallelization

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Concept of Device

Batch fabrication by micromachining technologies
Cantilever with embedded microchannels
Volcano-shape dispensing tip
On-chip reservoir (~1 mm3)

August 6, 2004 US-South America Workshop

SLIDE 4

Nano Fountain Probe Chip

August 6, 2004 US-South America Workshop

SLIDE 5

Acknowledgments

H. Espinosa, Northwestern University
N. Moldovan, Northwestern University
C. Ke, Northwestern University

National Science Foundation - Nanoscale Science and Engineering Center (NSEC) at Northwestern University, Award Number EEC-0118025 Microfabrication Applications Laboratory, University of Illinois at Chicago Electron Probe Instrumentation Center, Northwestern University Microfabrication Facilities, Advanced Photon Source Experimental Facilities Division, Argonne National Laboratory

August 6, 2004 US-South America Workshop