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A new method for directly determining the adhesive strength of conductors on micro structured MID
- H. Willeck, HSG-IMAT
A new method for directly determining the adhesive strength of - - PowerPoint PPT Presentation
A new method for directly determining the adhesive strength of conductors on micro structured MID H. Willeck, HSG-IMAT 4M2007 Conference on Multi-Material Micro Manufacture 3-5 October 2007 Borovets, Bulgaria www.hsg-imat.de Overview
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10 mm Rotation angle sensor in MID LDS technology (BMBF-Verbundvorhaben IMDAKT )
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Conductor- substrate interface
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z y Fy
Fz ≈ ≈ ≈ ≈ 0 small chip angle Fy < Fz Fz
big chip angle
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y forces z forces
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peel forces z forces
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100 µm
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y forces z forces
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y forces z forces
1000 2000 3000 500 1000 1500 2000 Y-Tisch-Position [µm] Kraft [mN]
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