SLIDE 1
TMAH Recovery Process from the Waste Water In Taiwan , three - - PowerPoint PPT Presentation
TMAH Recovery Process from the Waste Water In Taiwan , three - - PowerPoint PPT Presentation
TMAH Recovery Process from the Waste Water In Taiwan , three operators died due to TMAH TMAH TMAH is is Fatal to Human Highly Bio-toxicity + in waste Main Source of NH 4 T etr etra M eth yl A mmon ium H ydr ethyl mmonium droxide xide CH 3
SLIDE 2
SLIDE 3
TMAH TMAH is
is
Main Source of NH4
+ in waste
Highly Bio-toxicity Fatal to Human
SLIDE 4
Tetr
etraMeth ethyl ylAmmon mmonium ium Hydr droxide xide
N+ CH3 CH3 CH3 CH3 OH-
SLIDE 5
Because we need them
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50,000 100,000 150,000 200,000 250,000 2012 2013 2014 2015 2016 2017 2018
25%TMAH demand, m3 Year
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EX
Faci cili lity ty Inve vestment= stment= 100M 0M Running nning Cost= st=6M 6M ROI=0.7y 0.7year ear
100 100 CMD 0.5 % 3000 3000 CMD 30 30 ppm ppm 167 167 ppm ppm 5.56 138.9 NT/m3 152 152 MNTD/year Unit price charge CH=
H=
Total charge= Pd/P /Psd
sd=
TMAH Waste= TMAH= Volume of total Waste= Criterion Psd
sd=
Average Pd=
SLIDE 8
4(CH3)4N + + 8H2O → 12CH4 + 4CO2 + 4NH4
+
NH4
+ + 2O2 → NO3
- + 2H+ + H2O
NO3
- → NO2
- → NO → N2O → N2
SLIDE 9
Large Space Required?
2,000m2 enough?
Cost?
Hundreds of Millions Resource gone?
Long lead time for decomposition
more then 10 hours?
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新 信
2007 R&D 2008 Leading Product (IDB) 2009 Permit for waste reuse(trial) 2010 Commercial Run
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500 1,000 1,500 2,000 2,500 3,000
10 20 30
TMAHConc.，ppm Raiton of Flow Quantity vs Resin Bed Volume
Efficiency of TMAH removal
TMAH
創新 誠信 簡樸
Remove TMAH from waste by Resin
TMA+ TMA+
Cation Exchange Resin
H H H H H H H H TMA TMA
Cation Exchange Resin
H+ H+ H H H H H H
TMA+OH- + H+-Resin →TMA+-Resin + H2O
HX TMAX
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創新 誠信 簡樸
Recover to 25%TMAH by ElectroDialysis
+
- TM
TMAX TM TMAX TM TMA+ X- HX HX TM TMAH OH OH- 2H 2H2O+2e O+2e- ↓ 2OH 2OH-+H +H2 H2O ↓ 2e 2e-+1/2O2+2H +2H+ H+
TMAX →TMA+ + X + X-
Anolyte ：
TMA TMA +
+ +OH
+OH- →TMAH TMAH
Catholyte ：
H +
+ +X
+X- →HX HX
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Lithography TMAH Waste Resin Tower Purification Electrolysis
25% TMAH
Effluent TMAH<10ppm Cond.<20μS/cm Water Recovery All metal<2ppb Customer Site SanFu Site
1. 1.Cus
ustom tomer er Orien rienta tation tion
1.Space Saving 2.Cost Saving 3.Resource Recycling
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2.
- 2. All
ll Rec ecycla lable ble
TMAH HX TMAH Waste HX
TMAH Recycling System
Low Contamination
(EL Grade) (EL Grade)
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3.
- 3. Qua
uali lity ty Relia eliabl bly
※ Commercial TMAH Manufacturing Process
1.High 1.High Yield Yield 2.High 2.High Qua Quali lity ty
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Large Space Required?
2,000m2 enough?
Cost?
Hundreds of Millions Resource gone?
Long lead time for decomposition
more then 10 hours?
Small Space Req
hundreds SQM
Low Initial Cost
simple & easy
Instant TMAH removal
stable & reliable
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For More Information
- Pls contact Chih-Ming Huang
San Fu ext. (06) 583-7608 ext. 750 Cell phone 0972-245-779
- r E-mail: cmhuang@sfchem.com.tw