TMAH Recovery Process from the Waste Water In Taiwan , three - PowerPoint PPT Presentation

TMAH Recovery Process from the Waste Water

In Taiwan , three operators died due to TMAH

TMAH TMAH is is Fatal to Human Highly Bio-toxicity + in waste Main Source of NH 4

T etr etra M eth yl A mmon ium H ydr ethyl mmonium droxide xide CH 3 CH 3 OH - CH 3 N + CH 3

Because we need them

250,000 25%TMAH demand, m3 200,000 150,000 100,000 50,000 0 2012 2013 2014 2015 2016 2017 2018 Year

EX TMAH Waste= 100 100 CMD TMAH= 0.5 % Volume of total Waste= 3000 3000 CMD Criterion P sd sd = 30 30 ppm ppm Average P d = 167 167 ppm ppm P d /P /P sd sd = 5.56 NT/m 3 Unit price charge C H= 138.9 H= Total charge= 152 152 MNTD/year Faci cili lity ty Inve vestment= stment= 100M 0M Running nning Cost= st=6M 6M ROI=0.7y 0.7year ear

4(CH 3 ) 4 N + + 8H 2 O → 12CH 4 + 4CO 2 + 4NH 4 + + + 2O 2 → NO 3 - + 2H + + H 2 O NH 4 - → NO 2 - → NO → N 2 O → N 2 NO 3

 Long lead time for decomposition more then 10 hours?  Large Space Required ? 2,000m 2 enough?  Cost ? Hundreds of Millions Resource gone?

2010 Commercial Run 2009 Permit for waste reuse(trial) 2008 Leading Product 2007 (IDB) R&D 新 信

Remove TMAH from waste by Resin Efficiency of TMAH removal TMAH 3,000 TMAHConc. ， ppm 2,500 2,000 H + TMAX TMA + 1,500 1,000 HX 500 H + 0 TMA + TMA H 0 10 20 30 TMA Raiton of Flow Quantity vs Resin Bed Volume H H H Cation Cation H H H H Exchange Exchange Resin Resin H H H H H H TMA + OH - + H + - Resin → TMA + -Resin + H 2 O 創新 誠信 簡樸

Recover to 25%TMAH by ElectroDialysis - + TMAX →TMA + + X + X - TM TMAX TM TMAH HX HX Anolyte ： OH OH - TMA + TM +OH - → TMAH 2H 2 O+2e 2H O+2e - TMA + TMA + +OH TMAH H 2 O ↓ H + ↓ 2OH 2OH - +H +H 2 Catholyte ： X - 2e - + 1 / 2 O 2 +2H 2e +2H + +X - → HX H + + +X HX TMAX TM 創新 誠信 簡樸

1.C us 1. er O rien ustom tomer rienta tation tion Effluent Water TMAH<10ppm Recovery Cond.<20 μ S/cm Lithography TMAH Waste Resin Tower Purification Customer Site 25% TMAH 1.Space Saving All metal<2ppb Electrolysis 2.Cost Saving SanFu Site 3.Resource Recycling

2. 2. A ll ll R ec ecycla lable ble Low Contamination (EL Grade) TMAH TMAH Waste TMAH Recycling HX System HX (EL Grade)

3. 3. Q ua ty R elia uali lity eliabl bly ※ Commercial TMAH Manufacturing Process 1.High 1.High Yield Yield 2.High 2.High Qua Quali lity ty

 Instant TMAH removal  Long lead time for decomposition stable & reliable more then 10 hours?  Small Space Req  Large Space Required ? 2,000m 2 enough? hundreds SQM  Cost ?  Low Initial Cost simple & easy Hundreds of Millions Resource gone?

For More Information • Pls contact Chih-Ming Huang San Fu ext. (06) 583-7608 ext. 750 Cell phone 0972-245-779 • or E-mail: cmhuang@sfchem.com.tw