SLIDE 8 martin.liebhaber@helmholtz-berlin.de 8
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV) Intensity (10
3 cps)
108 106 104 102 100 98 0.0 0.5 1.0 1.5 Binding energy Ebind (eV)
CO2 flow
0 sccm 1 sccm 2 sccm 3 sccm 4 sccm 5 sccm 6 sccm 7 sccm 8 sccm
Intensity (10
3 cps)
CO2 flow
precursor gas mixture variation gas flow (sccm) 5 10
H2 SiH4 CO2 SiO2 (80% CO2) pure Si (0% CO2)
- M. Liebhaber et al., APL 106, 031601 (2015)
a-Si:H SiO2
Stoichiometry (XPS)
► X-ray Photoelectron Spectroscopy ► Si 2p peak