Amira hK a ssim T he F unc tio na l Ma te ria ls Applie d Re se - - PowerPoint PPT Presentation

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Amira hK a ssim T he F unc tio na l Ma te ria ls Applie d Re se - - PowerPoint PPT Presentation

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Ultr asonic ally e nable d L ow T e mpe r atur e E le c tr ole ss and Imme r sion Me tallisation Amira hK a ssim T he F unc tio na l Ma te ria ls Applie d Re se a rc h Gro up Co ve ntry Unive rsity Ultr asonic ally e nable d L ow

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SLIDE 1

Ultr asonic ally e nable d L

  • w T

e mpe r atur e E le c tr

  • le ss and

Imme r sion Me tallisation

Amira hK a ssim

T he F unc tio na l Ma te ria ls Applie d Re se a rc h Gro up Co ve ntry Unive rsity

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SLIDE 2

Ultr asonic ally e nable d L

  • w T

e mpe r atur e E le c tr

  • le ss and

Imme r sion Me tallisation

  • 3 ye a r pro je c t, sta rte d in Oc to b e r 2010
  • F

unde d b y: I e MRC

  • Ob je c tive : to re duc e the pla ting te mpe ra ture s

use d in e le c tro le ss a nd imme rsio n pla ting b y the a pplic a tio n o f ultra so und

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SLIDE 3

Ultr asonic ally e nable d L

  • w T

e mpe r atur e E le c tr

  • le ss and

Imme r sion Me tallisation

E le c tro le ss a nd I mme rsio n pla ting pro c e sse s use d in Pho to vo lta ic a nd Printe d Circ uit Bo a rd ma nufa c ture

Pr

  • c e ss

T e mpe r atur e (oC) Comme nts

E le c tr

  • le ss

Coppe r 30 – 70 Contains for malde hyde E le c tr

  • le ss

Nic ke l 50 – 90 High te mpe r atur e s r e quir e d for good de position r ate Imme r sion Silve r 40 – 90 Imme r sion Gold 80 – 90

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SLIDE 4
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SLIDE 5

T he e ffe c t of sound on the c he mistr y of a solution 103 104 105 106 107

Human He ar ing Diagnostic Ultr asound

20kHz – 2MHz E xte nde d r ange ultr asound for sonoc he mistr y

Ultr asound

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SLIDE 6

COMPRESSION COMPRESSION COMPRESSION COMPRESSION RAREFACTION RAREFACTION RAREFACTION RAREFACTION RAREFACTION

BUBBLE FORMS GROWS IN SUCCESSIVE CYCLES REACHES UNSTABLE SIZE VIOLENT COLLAPSE

5000oC 2000 ats

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SLIDE 7

Ac oustic c avitation in a liquid: NE AR A SURF ACE

So lid Surfa c e Bo unda ry L a ye r

Asymme tr ic c ollapse

Rush of liquid fr

  • m one side

pr

  • duc e s a powe r

ful je t of liquid tar ge te d at the sur fac e .

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SLIDE 8

Vide o c o urte sy o f Unive rsity o f T we nte , Ne the rla nds. a nd Shima dzu E uro pa Gmb H, Duisb urg , Ge rma ny

Ac oustic c avitation in a liquid: NE AR A SURF ACE

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SLIDE 9

E le c tr

  • c he mic al E

ffe c ts

  • T

hinning of diffusion laye r

  • Impr
  • ve d mass tr

anspor t

  • Impr
  • ve d solution move me nt
  • E

le c tr

  • de c le aning
  • De gassing

Ac oustic c avitation in a liquid: NE AR A SURF ACE

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SLIDE 10

E ffe c t of ultr asound on plating r ate

Wor ke r s Plate d Me tal Re duc ing Age nt Plating r ate Inc r e ase De c r e ase Abyane h e t al Nic ke l Hypophosphite

c omple xing age nt= low c omplxing age nt = high

Mallor y Nic ke l Hypophosphite

lowthiour e a c onc e ntr ation highthiour e a c onc e ntr ation

Masuoka and Hayashi Nic ke l Hypophosphite Yang e t al Nic ke l Hypophosphite T

  • uye r

as e t al Coppe r F

  • r

malde hyde Zaho e t al Coppe r F

  • r

malde hyde

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SLIDE 11

Ultr asonic fr e que nc y = 530kHz

Data r e pr

  • duc e d by kind pe r

mission of; F . T

  • uye r

as e t al Ultr asonic s Sonoc he mistr y 10 (2003) 363–368

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SLIDE 12
  • Impr
  • ve d mass tr

anspor t

  • T

hinning of diffusion laye r

  • Cr

ystal str uc tur e for me d unde r ultr asonic c onditions in the initial stage s of plating (Abyane h e t al)

  • L
  • c alise d he ating in the diffusion laye r

(T

  • ye r

as e t al)

  • Ac tivation of c atalyst
  • De gassing
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SLIDE 13
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SLIDE 14

Rinse 5 minute s Conditione r 5 minute s 30- 60oC Pr e - dip 1 minute RT Ac c e le r ator 2 minute s RT Catalyst 5 minute s 30- 50oC Rinse 5 minute s Rinse 3 minute s E le c tr

  • le ss Coppe r

25- 60 minute s 30- 70oC

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SLIDE 15

Pd Pd Pd Pd Pd Pd Pd Pd

HCHO Oxidation Cu2+ Re duc tion 2e -

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SLIDE 16

Coppe r de posit on the sur fac e of the substr ate .

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SLIDE 17
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SLIDE 18

E le c tro le ss Co ppe r – 3350-1 (Che ste c h L td) – E DT A b a se d So lutio n sub je c te d to ultra so nic irra dia tio n o f diffe re nt fre q ue nc ie s c o ntinuo usly fo r 4 ho urs.

Ultr asonic F r e que nc y Coppe r Conc . afte r 4 hour s Coppe r Conc . afte r 48 hour s

Contr

  • l

(Me c hanic al Stir r ing) 100% 100% 20 kHz (20 % Amplitude ) Pr e c ipitate d NA 40 kHz 100% 100% 582 kHz 100% 70% 863 kHz 100% Pr e c ipitate d

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SLIDE 19

20 kHz - Pre c ipita te s c o ppe r fro m so lutio n a fte r 4 ho urs E ffe c ts o f c a vita tio n de stro y c he mic a ls in e le c tro le ss fo rmula tio n e .g . E DT A, sta b ilize rs 40 kHz – Sta b le a fte r 4 ho urs a nd 48 ho urs Hig h fre q ue nc y (583/ 850 kHz) – unsta b le Ra dic a l fo rma tio n – o xida tio n o f c he mic a ls in e le c tro le ss fo rmula tio n

Pr e c ipitate , 70% Cu in Solution 100% Cu in solution Pr e c ipitate d

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SLIDE 20
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SLIDE 21

E xpe r ime ntal Pr

  • c e dur

e

  • E

le c tro le ss Co ppe r – 3350-1 (Che ste c h L td) – 1 litre

  • Ca ta lyst – 3344 (Che ste c h L

td – Pd/ Sn c o llo id)

  • Sub stra te – Unc la d e po xy la mina te (I

so la Dura ve r 104)

  • T

e mpe ra ture - 25, 30, 35, 40, 45 a nd 50 ºC

  • Pla ting T

ime – 25 minute s

  • Ag ita tio n - Ultra so und (40 kHz) o r Ma g ne tic Stirring

Ultra so nic Ba th – L a ng fo rd, Mo de l 475T T 40 kHz Po we r de nsity 90.3 W/ litre

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SLIDE 22

Re sponse s

  • 1. We ight gain

Dry e po xy pa ne ls in o ve n fo r 24 ho urs a t 120 ºC We ig h Pro c e ss thro ug h E le c tro le ss Co ppe r We ig h Dry e po xy pa ne ls in o ve n fo r 24 ho urs a t 120 ºC

F r

  • m we ight gain  c alc ulate plating r

ate .

  • 2. Mor

phology Sc anning E le c tr

  • n Mic r
  • sc ope
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SLIDE 23

Plating rate µm/25min

Ma in e ffe c t o n pla ting ra te is te mpe ra ture – pa rtic ula rly a b o ve 40 ºC Ultra so und ha d a slig ht ne g a tive e ffe c t a t lo w te mpe ra ture Slig ht impro ve me nt a t 35 ºC a nd a b o ve

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SLIDE 24

Pd Pd Pd Pd Pd Pd Pd Pd

Ultr asonic Mic r

  • je ts
  • Ultra so und sc rub s surfa c e a nd

re mo ve s c a ta lyst

  • L
  • we rs pla ting ra te
  • Pa rtic ula rly pro b le ma tic a t lo w

te mpe ra ture – lo ng e r initia tio n time

  • At hig h te mpe ra ture (50 ºC)

ultra so und a lwa ys pro duc e s g o o d re sults – sho rt initia tio n time

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SLIDE 25

Plating rate µm/25min

Pla ting ra te rise s a s de la y time inc re a se s to 7 minute s 10 minute de la y c a use s pla ting ra te to dro p sinc e a lmo st ha lf the pla ting time is witho ut a g ita tio n

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SLIDE 26

Afte r 10 minute s ultra so und mo st o f c a ta lyst re mo ve d fro m surfa c e

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SLIDE 27

Plating rate µm/25min

7 minute de la y – b e st pla ting re sults ‘ with ultra so und’ a t a ll te mpe ra ture s Ultra so und with 7 minute de la y a t 40 ºC g ive s pla ting ra te s hig he r tha n ‘ sile nt’ pla ting a t 45 ºC

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SLIDE 28
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SLIDE 29

Ultr asound 40 ºC Sile nt

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SLIDE 30

Conditions: F r e que nc y= 40kHz 7 minute de lay

Ultr asound r e duc e s plating te mpe r atur e Re duc e s e ne r gy ne e de d

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SLIDE 31

T hank You

www.ultie me t.c o.uk/