Nanonets2Sense Nanonet-based integrated sensors for health and - PowerPoint PPT Presentation

Nanonets2Sense Nanonet-based integrated sensors for health and well-being Integration concept and project overview M. Mouis, Project leader IMEP-LaHC (CNRS, UGA, Grenoble INP, F-38000 Grenoble, France) mouis@minatec.grenoble-inp.fr M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Nanonets2Sense partners ams Sensors UK Limited KTH, Stockholm Coordinator: Grenoble-INP (FMNT): IMEP-LaHC, LMGP and LTM AMS, Premstätten Sinano Institute, Grenoble M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 2 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Nanonets2Sense outline H2020/ICT/RIA project n ° 688329 (2016-2019) Development of a versatile technology block for 3D integration of nanowire-based devices above IC For demonstration, applications envisioned in health and well-being ● DNA detection in body fluids ● Acetone detection in breath M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 3 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Technical context M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 4 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Principle of DNA detection (1) General principle of selective DNA detection A bio fluid contains many molecules. How to detect where hybridization The target is a took place? specific DNA sequence Non complementary species are rinsed away The fluid is put in contact with a Target DNA is functionalized surface immobilized by complementary Selective Devices with covalently probes attached DNA probes in essence M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 5 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Principle of DNA detection (2) Usual technique: DNA labelling followed by optical detection DNA strands are labelled with fluorophores before analysis F F Illuminated regions on the surface are those where target DNA has been immobilized M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 6 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Example Optical detection of DNA hybridization on SOI ribbons and NWs SOI devices with back-gating fabricated at KTH and functionalized at Grenoble INP. NWs and ribbons Spacer transfer lithography technique Confocal microscopy Jayakumar et al. SPIE ‘2016 Fluorescence obtained where target DNA hybridizes to probes Here: visible on ribbons, not on NWs (too small magnification). M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 7 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Alternative: field-effect in nanowires Back-gated structures P-type NW-FET Negative density of charge at the surface leaves a large current density at the top. 0 Threshold voltage V th is shifted to more positive values. NW with a negative density of charge at its surface D V th can be used to probe D Q ext Bare NW Large current density, focused at the bottom for V G < Vth  Small residual current at the top (which decreases as V G increases) for V G >V th 0 Current density M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 8 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Application to biosensing (1) DNA detection: DNA is negatively charged Detection using field-effect Current Immobilized target DNA brings an additional density of negative charges Detection of the Voltage related threshold voltage shift M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 9 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Application to biosensing (2) Some metal oxides (MOx) can have their surface reduced or oxidized in the presence of some gases Usual configuration ● Resistor geometry ● Thermally activated processes ● Requires heating Detection : change in current / resistivity M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 10 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Possible applications In health ● Monitor the evolution of a tumour during medical treatment: Dying tumours release circulating micro-RNAs in blood ● Detect hormones or proteins in sweat: Using aptamers instead of DNA probes ● Monitor diabetes The presence of acetone in breath is an indication that the body runs low on insulin and burns fatty acids for energy For well-being ● e. g. sports or some diets M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 11 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Nanonets2Sense rationale M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 12 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Nanonets2Sense main objective Develop a low cost, generic and CMOS compatible technology to integrate semiconducting nanowires above IC (in 3D) Technology requirements ● No annealing at temperatures above about 400 ° C ● Standard lithography (no e-beam) ● Avoid long series of critical processing steps ● Versatility  can be used with different materials and functionalization techniques Functional requirements ● Field effect operation obtained with back-gating ● Keep the benefit of nanowire sensitivity The microfluidics is not integrated at this stage ● Could be the topic of a follow-up M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 13 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Main techniques for NW integration “Bottom - up” approach “Top - down” approach • • Nanowires are grown, cut, and dispersed Nanowires are etched into a substrate. on a substrate (random positions). In this example nanowires are released by • Contacts are positioned by expensive chemical etching after trench etching into e-beam lithography. stacked layers of Si and SiGe. • • “Made to measure” process of each En masse fabrication but costly process. device. 1 µm Hahm et al. (U. Warwick) Nano Letters 2004 Buitrago et al. (EPFL) Sens. & Act. 2014 M. Mouis Nanonets2Sense Project Overview (M. Mouis) Page 14 IMEP-LaHC G.A. n.688329

Our proposal Based on the use of semiconducting nanonets Gruner G., SCIAM 2007. Based on Based on etched bottom-up down NW nanowires fabrication Combination of bottom-up and top-down approaches ● See following talks by C. Ternon and P.-E. Hellström M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 15 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

CMOS integration Possible to stack sensors and readout above each other (3D integration) Back-gating available at no technological cost Interconnects between sensors and readout routed in BEOL layers Saves wafer area : saves cost. M. Mouis Nanonets2Sense NEREID Session 2 16 IMEP-LaHC G.A. n.688329

Versatility Channel material ● Nanowires obtained by other means (e. g. catalyzed growth of NWs in liquid) ● Nanonets of other semiconducting materials ● 2D materials Functionalization ● The functionalization process is valid for any DNA sequence ● Also valid for aptamers (same chemical termination)  Contribution to WP1 of FlagERA CONVERGENCE for the detection of hormones or proteins M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 17 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Multiplex sensing Several sensing elements can be probed in parallel Possible application : Detect the presence of several different molecules that are together typical of a given disease in order to improve diagnostics reliability M. Mouis Nanonets2Sense NEREID Session 2 18 IMEP-LaHC G.A. n.688329

Next talks Engineering of Si and ZnO nanonets for the fabrication of functional devices (C. Ternon, Grenoble INP) Si nanowire-based biosensors integration with CMOS (P.-E. Hellström, KTH) Characterization and modelling of nanonet-based FETs in the presence of percolating effects (T. Cazimajou, Grenoble INP) Low-power readout for threshold voltage shifts detection (S. Rodriguez, KTH) Chemiresistors for breath analysis (C. Zuliani, ams UK Ltd) M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 19 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329

Thank you for your attention ! M. Mouis ESSDERC 2018 - SiNano Worskshop Nanonets2Sense Page 20 3-6 September 2018 - Dresden, Germany IMEP-LaHC G.A. n.688329