Nanonets2Sense Nanonet-based integrated sensors for health and - - PowerPoint PPT Presentation

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Nanonets2Sense Nanonet-based integrated sensors for health and - - PowerPoint PPT Presentation

Jan 07, 2023 20 likes •227 views

Nanonets2Sense Nanonet-based integrated sensors for health and well-being Integration concept and project overview M. Mouis, Project leader IMEP-LaHC (CNRS, UGA, Grenoble INP, F-38000 Grenoble, France) mouis@minatec.grenoble-inp.fr M. Mouis

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Nanonets2Sense

Nanonet-based integrated sensors for health and well-being Integration concept and project overview

  • M. Mouis, Project leader

IMEP-LaHC (CNRS, UGA, Grenoble INP, F-38000 Grenoble, France) mouis@minatec.grenoble-inp.fr

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Nanonets2Sense partners

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 2

KTH, Stockholm AMS, Premstätten ams Sensors UK Limited Coordinator: Grenoble-INP (FMNT): IMEP-LaHC, LMGP and LTM Sinano Institute, Grenoble

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Nanonets2Sense outline

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 3

H2020/ICT/RIA project n° 688329 (2016-2019) Development of a versatile technology block for 3D integration of nanowire-based devices above IC For demonstration, applications envisioned in health and well-being

  • DNA detection in body fluids
  • Acetone detection in breath
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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Technical context

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 4

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

General principle of selective DNA detection

Principle of DNA detection (1)

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 5

Devices with covalently attached DNA probes A bio fluid contains many molecules. The target is a specific DNA sequence The fluid is put in contact with a functionalized surface Non complementary species are rinsed away Target DNA is immobilized by complementary probes

How to detect where hybridization took place? Selective in essence

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Principle of DNA detection (2)

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 6

Usual technique: DNA labelling followed by optical detection

DNA strands are labelled with fluorophores before analysis Illuminated regions on the surface are those where target DNA has been immobilized

F F

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Example

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 7

SOI devices with back-gating fabricated at KTH and functionalized at Grenoble INP. NWs and ribbons Spacer transfer lithography technique Confocal microscopy

Fluorescence obtained where target DNA hybridizes to probes Here: visible on ribbons, not on NWs (too small magnification).

Optical detection of DNA hybridization on SOI ribbons and NWs

Jayakumar et al. SPIE ‘2016

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Alternative: field-effect in nanowires

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 8

Back-gated structures

Negative density of charge at the surface leaves a large current density at the top. Threshold voltage Vth is shifted to more positive values.

NW with a negative density of charge at its surface Bare NW

Large current density, focused at the bottom for VG < Vth  Small residual current at the top (which decreases as VG increases) for VG>Vth P-type NW-FET

DVth can be used to probe DQext

Current density

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Application to biosensing (1)

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 9

DNA detection: DNA is negatively charged Detection using field-effect

Immobilized target DNA brings an additional density

  • f negative charges

Current Voltage

Detection of the related threshold voltage shift

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Application to biosensing (2)

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 10

Some metal oxides (MOx) can have their surface reduced or oxidized in the presence of some gases Usual configuration

  • Resistor geometry
  • Thermally activated processes
  • Requires heating

Detection : change in current / resistivity

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Possible applications

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 11

In health

  • Monitor the evolution of a tumour during medical treatment:

Dying tumours release circulating micro-RNAs in blood

  • Detect hormones or proteins in sweat:

Using aptamers instead of DNA probes

  • Monitor diabetes

The presence of acetone in breath is an indication that the body runs low on insulin and burns fatty acids for energy

For well-being

  • e. g. sports or some diets
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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Nanonets2Sense rationale

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 12

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Nanonets2Sense main objective

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 13

Develop a low cost, generic and CMOS compatible technology to integrate semiconducting nanowires above IC (in 3D) Technology requirements

  • No annealing at temperatures above about 400°C
  • Standard lithography (no e-beam)
  • Avoid long series of critical processing steps
  • Versatility  can be used with different materials and functionalization

techniques

Functional requirements

  • Field effect operation obtained with back-gating
  • Keep the benefit of nanowire sensitivity

The microfluidics is not integrated at this stage

  • Could be the topic of a follow-up
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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Main techniques for NW integration

Project Overview (M. Mouis) Page 14

“Bottom-up” approach

Hahm et al. (U. Warwick) Nano Letters 2004 Buitrago et al. (EPFL) Sens. & Act. 2014

  • Nanowires are grown, cut, and dispersed
  • n a substrate (random positions).
  • Contacts are positioned by expensive

e-beam lithography.

  • “Made to measure” process of each

device.

  • Nanowires are etched into a substrate.

In this example nanowires are released by chemical etching after trench etching into stacked layers of Si and SiGe.

  • En masse fabrication but costly process.

“Top-down” approach

1 µm

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Our proposal

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 15

Based on the use of semiconducting nanonets

Based on etched down nanowires Based on bottom-up NW fabrication

Gruner G., SCIAM 2007.

Combination of bottom-up and top-down approaches

  • See following talks by C. Ternon and P.-E. Hellström
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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

NEREID Session 2 16

CMOS integration

Possible to stack sensors and readout above each other (3D integration)

Back-gating available at no technological cost Interconnects between sensors and readout routed in BEOL layers Saves wafer area : saves cost.

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Versatility

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 17

Channel material

  • Nanowires obtained by other means

(e. g. catalyzed growth of NWs in liquid)

  • Nanonets of other semiconducting materials
  • 2D materials

Functionalization

  • The functionalization process is valid for any DNA sequence
  • Also valid for aptamers (same chemical termination)

 Contribution to WP1 of FlagERA CONVERGENCE for the detection of hormones or proteins

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Multiplex sensing

NEREID Session 2 18

Several sensing elements can be probed in parallel

Possible application : Detect the presence of several different molecules that are together typical of a given disease in order to improve diagnostics reliability

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

Next talks

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 19

Engineering of Si and ZnO nanonets for the fabrication of functional devices (C. Ternon, Grenoble INP) Si nanowire-based biosensors integration with CMOS (P.-E. Hellström, KTH) Characterization and modelling of nanonet-based FETs in the presence of percolating effects (T. Cazimajou, Grenoble INP) Low-power readout for threshold voltage shifts detection (S. Rodriguez, KTH) Chemiresistors for breath analysis (C. Zuliani, ams UK Ltd)

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Nanonets2Sense G.A. n.688329

  • M. Mouis

IMEP-LaHC

ESSDERC 2018 - SiNano Worskshop 3-6 September 2018 - Dresden, Germany Page 20

Thank you for your attention !