SLIDE 1
Micro-Channel Cooling Device
9/20/2011 1 Andreas Jilg
Micro-Channel Cooling Device
Silicon Wafer Sensor Pyrex Cover Chip
9/20/2011 2 Andreas Jilg
Micro-Channel Cooling Device 9/20/2011 Andreas Jilg 1 - - PowerPoint PPT Presentation
Micro-Channel Cooling Device 9/20/2011 Andreas Jilg 1 - - PowerPoint PPT Presentation
Micro-Channel Cooling Device 9/20/2011 Andreas Jilg 1 Micro-Channel Cooling Device Pyrex Sensor Cover Silicon Wafer Nanoport-connector Nanoport-tube Chip 9/20/2011 Andreas Jilg 2 Wafer 311 Channels: 100m x 100m A t = 380m d
SLIDE 2
SLIDE 3
Wafer
311 Channels: 100µm x 100µm d = 280µm t = 380µm
9/20/2011 3 Andreas Jilg
A
SLIDE 4
Chip
2x5 chips
9/20/2011 4 Andreas Jilg
t = 100µm
SLIDE 5
Sensor
9/20/2011 5 Andreas Jilg