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Cluster Tool Simulation Group (CTSG) Claire Gryphon Luis Ayala Muhaimeinul Khan Tariq Hanif
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Luis Ayala Muhaimeinul Khan Tariq Hanif 1 2 3 4 5 Recipe - - PowerPoint PPT Presentation
Luis Ayala Muhaimeinul Khan Tariq Hanif 1 2 3 4 5 Recipe - - PowerPoint PPT Presentation
Cluster Tool Simulation Group (CTSG) Claire Gryphon Luis Ayala Muhaimeinul Khan Tariq Hanif 1 2 3 4 5 Recipe Sequence [Lot processing order] Gases [B, As, C, P, Ge] Processed Implant Elements Wafers Lot Train [L1(25), L2 (23), etc.]
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Gases [B, As, C, P, Ge] Recipe Sequence [Lot processing order] Implant Elements Processed Wafers Lot Train [L1(25), L2 (23), etc.] Implant Tool
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New Regions Ions
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Recipe Sequence Scheduling System Simulation Model Input File Output Report
Schedule adjustments
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sct sct SourceChangeProcess+sct sc sc sc+1 yes x lr if (lr=yes) then 1`yes else empty yes if (ll=yes) then 1`yes else 1`no if (ll=yes) then 1`yes else empty if (ll=yes) then 1`st else empty ll if (length(trains)=0) then 1`yes else 1`no st st yes yes RanDet (r) (t,s,r,pt):: trains if (Mode = "cont") then 1`yes else empty yes lc lc if (trains=[]) then 1`0 else 1`lc lc+1 t t+1 c c+1 x x-1 lcount lcount lcount+1 yes x x (t,s,r,pt):: trains (t,s,r,pt):: trains ProcessDelay(r,prerep)+tpt tpt st st if (trains=[]) then 1`0 else 1`(pt+sct) pt if (trains=[]) then 1`0 else 1`sut sut trains trains yes sut sut+SetupDelay(r,prerep) yes yes if (length(rs)=0) then 1`yes else empty trains trains yes (t,s,r,pt):: trains trains^^ [(t,25,r,0)] (t,s,r,pt) (t,s,r,pro,pt) (t,s,r,pro,pt) st yes yes (tstat,prerep) SetUpUpdate (r,prerep,tstat) (t,s,r,SetupDelay (r,prerep)) (t,s,r,pt) if (Mode="cont") then InitSourceState else st st-x st (t,s,r,pt) c-1 c rs r::rs inreps rs ReadRep (inrep,rs) inrep::inreps (tstat,prerep) (tstat,r) (tstat,prerep) (tstat,prerep) Generate Random Deterioration Check [lcount=length(RepSeq)] Generate Statistics Receive Next Lot [(st-x)>=0] Set Up @+SetupDelay(r,prerep) [prerep = U orelse r<>prerep] P_HIGHER Dispatch Lot P_MEDIUM Read Input File [c=x] Convert STRING To Recipe Change Source @+SourceChangeProcess [st<=0 orelse ((st-x)<=0)] Implantation @+ProcessDelay(r,prerep) [tstat=AVA andalso st>0] P_HIGH Change Time 1`0 INT Source Changes 1`0 INT Train Done Ready Last Lot Removed TReady Last Lot Ready End ST INT Tool Ava 2 1`yes Ready No Pro lots 2 1`0 INT Lot No 1`1 INT No Of Lots 1`length(RepSeq) INT No Pro Lots 1 1`0 TINT Deterioration INT Set Up Time 1`0 INT IF Read Ready Train 1`[] Train Processed Lots ProList Process Time 1`0 INT Source Stopped Ready Ion Source 1`InitSourceState Source Tool Ava 1 1`yes Ready Next Lot Lot Recipe List 1`RepSeq InRep Lot No Check 1`0 INT Implant Tool 1`(AVA,U) ToolStatus Recipe Seq 1`[] RepSeq 1 1`0 1 1`0 1 1`yes 1 1`0 1 1`1 1 1`518 1 1`0@0 1 1`0 1 1`[] 1 1`0 1 1`1000 1 1`yes 1 1 1`0 1 1`(AVA,U)@0 1 1`[]
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A A B D C E E
B, C, A, A, D, E, E
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Recipes to be
- rganized
New Recipe Sequence Find smallest job Sequence finished?
Yes No
It tries to minimize set-up times
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Recipes to be
- rganized
New Recipe Sequence Find largest job Sequence finished?
Yes No
It tries to maximize set-up times
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Sequence to be
- rganized
New Sequence Find Recipe Types Calculate Permutation Calculate Time Shortest Permutation? Insert Repetitions Calculate Time
No Yes
It minimizes set-up times
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3000 3500 4000 4500 5000 5500 6000 1 2 3 4 5 6 7 8 9 10
Total Processing Time (min) Sequence Number
Total Processing Time
Longest Shortest Permutation
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100 200 300 400 500 600 700 800 900 1000 1 2 3 4 5 6 7 8 9 10
Remaining Source Life Sequence Number
Remaining Source Life
Longest Shortest Permutation
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Algorithm Average Processing Time (min) Average Remaining Source Life Average Source Changes Longest 4869.1 602.92 2.83 Shortest 3809.9 674.45 2 Permutation 3804.9 676.08 2
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