SLIDE 19 19
1 2 3 4 5 6 1 2 3 4
Signal intensity [arb. unit] Sputtering time [sec]
1 2 3 4 5 6 1 2 3 4
Signal intensity [arb. unit] Sputtering time [sec]
1 2 3 4 5 6 1 2 3 4
Signal intensity [arb. unit] Sputtering time [sec]
1 2 3 4 5 6 1 2 3 4
Signal intensity [arb. unit] Sputtering time [sec]
Preparation of samples
It has been clarified that due to heat treatments for 30min at 400℃ or less, pores between Pd and Ti are removed and the Pd layer is also remained.
Pd Ti w/ heat treatment (200℃ 30min) w/o W coating w/ heat treatment (400℃ 30min) w/o W coating w/ heat treatment (600℃ 30min) w/o W coating w/o heat treatment w/o W coating
50μm 20μm
Depth profiles of elements in each Pd-Ti sample by Glow discharge optical emission spectrometry (GD-OES). Pd Ti Pd Ti O (x50) C (x3) Pd Ti
50μm 20μm
Surface morphologies by SEM on each Pd-Ti sample which varied temperature of heat treatment. C (x3) C (x3) C (x3) O (x50) O (x50) O (x50)